Abstract: This paper describes a low-power second-order filter
for a continuous-time chopper stabilized capacitive sensor interface,
integrated with a fully differential post-CMOS surface-micromachined
MEMS pressure sensor. The circuit uses a single-ended
folded-cascode operational amplifier and two GM-C filters connected
in cascade. The circuit is realized in a 0.18 μm CMOS process and
offers differential to single-ended conversion. The novelty of the
scheme is the cascade of two GM-C filters to achieve a second-order
filter while minimizing power dissipation. The simulated filter cutoff
frequency is 1.14 kHz at common-mode voltage 1.65 V,
operating from a 3.3 V supply while dissipating 172μW of power.
The filter achieves an operating range of 1V for an output load of
1MOhm and 10pF.
Abstract: In this research, the flow pattern influence on
performance of a micro PEMFC was investigated
experimentally. The investigation focused on the impacts of
bend angels and rib/channel dimensions of serpentine flow
channel pattern on the performance and investigated how they
improve the performance. The fuel cell employed for these
experiments was a micro single PEMFC with a membrane of
1.44 cm2 Nafion NRE-212. The results show that 60° and 120°
bend angles can provide the better performances at 20 and 40
sccm inlet flow rates comparing to that the conventional design.
Additionally, wider channel with narrower rib spacing gives
better performance. These results may be applied to develop
universal heuristics for the design of flow pattern of micro
PEMFC.
Abstract: To understand working features of a micro combustor,
a computer code has been developed to study combustion of
hydrogen–air mixture in a series of chambers with same shape aspect
ratio but various dimensions from millimeter to micrometer level.
The prepared algorithm and the computer code are capable of
modeling mixture effects in different fluid flows including chemical
reactions, viscous and mass diffusion effects. The effect of various
heat transfer conditions at chamber wall, e.g. adiabatic wall, with
heat loss and heat conduction within the wall, on the combustion is
analyzed. These thermal conditions have strong effects on the
combustion especially when the chamber dimension goes smaller and
the ratio of surface area to volume becomes larger.
Both factors, such as larger heat loss through the chamber wall
and smaller chamber dimension size, may lead to the thermal
quenching of micro-scale combustion. Through such systematic
numerical analysis, a proper operation space for the micro-combustor
is suggested, which may be used as the guideline for microcombustor
design. In addition, the results reported in this paper
illustrate that the numerical simulation can be one of the most
powerful and beneficial tools for the micro-combustor design,
optimization and performance analysis.
Abstract: Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,
we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon
dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.
Abstract: There are various kinds of medical equipment which
requires relatively accurate positional adjustments for successful
treatment. However, patients tend to move without notice during a
certain span of operations. Therefore, it is common practice that
accompanying operators adjust the focus of the equipment. In this
paper, tracking controllers for medical equipment are suggested to
replace the operators. The tracking controllers use AHRS sensor
information to recognize the movements of patients. Sensor fusion is
applied to reducing the error magnitudes through linear Kalman filters.
The image processing of optical markers is included to adjust the
accumulation errors of gyroscope sensor data especially for yaw
angles.
The tracking controller reduces the positional errors between the
current focus of a device and the target position on the body of a
patient. Since the sensing frequencies of AHRS sensors are very high
compared to the physical movements, the control performance is
satisfactory. The typical applications are, for example, ESWT or
rTMS, which have the error ranges of a few centimeters.
Abstract: This paper presents design and characterization of a
microaccelerometer designated for integration into cataract surgical
probe to detect hardness of different eye tissues during cataract
surgery. Soft posterior lens capsule of eye can be easily damaged in
comparison with hard opaque lens since the surgeon can not see
directly behind cutting needle during the surgery. Presence of
microsensor helps the surgeon to avoid rupturing posterior lens
capsule which if occurs leads to severe complications such as
glaucoma, infection, or even blindness. The microsensor having
overall dimensions of 480 μm x 395 μm is able to deliver significant
capacitance variations during encountered vibration situations which
makes it capable to distinguish between different types of tissue.
Integration of electronic components on chip ensures high level of
reliability and noise immunity while minimizes space and power
requirements. Physical characteristics and results on performance
testing, proves integration of microsensor as an effective tool to aid
the surgeon during this procedure.
Abstract: Micro electromechanical sensors (MEMS) play a vital
role along with global positioning devices in navigation of
autonomous vehicles .These sensors are low cost ,easily available but
depict colored noises and unpredictable discontinuities .Conventional
filters like Kalman filters and Sigma point filters are not able to cope
with nonwhite noises. This research has utilized H∞ filter in nonlinear
frame work both with Kalman filter and Unscented filter for
navigation and self alignment of an airborne vehicle. The system is
simulated for colored noises and discontinuities and results are
compared with not robust nonlinear filters. The results are found
40%-70% more robust against colored noises and discontinuities.
Abstract: An array of piezoelectric micro actuators can be used
for radiation of an ultrasonic carrier signal modulated in amplitude
with an acoustic signal, which yields audio frequency applications as
the air acts as a self-demodulating medium. This application is
known as the parametric array. We propose a parametric array with
array elements based on existing piezoelectric micro ultrasonic
transducer (pMUT) design techniques. In order to reach enough
acoustic output power at a desired operating frequency, a proper ratio
between number of array elements and array size needs to be used,
with an array total area of the order of one cm square. The
transducers presented are characterized via impedance, admittance,
noise figure, transducer gain and frequency responses.
Abstract: This paper presents the modeling of a MEMS based accelerometer in order to detect the presence of a wheel flat in the railway vehicle. A haversine wheel flat is assigned to one wheel of a 5 DOF pitch plane vehicle model, which is coupled to a 3 layer track model. Based on the simulated acceleration response obtained from the vehicle-track model, an accelerometer is designed that meets all the requirements to detect the presence of a wheel flat. The proposed accelerometer can survive in a dynamic shocking environment with acceleration up to ±150g. The parameters of the accelerometer are calculated in order to achieve the required specifications using lumped element approximation and the results are used for initial design layout. A finite element analysis code (COMSOL) is used to perform simulations of the accelerometer under various operating conditions and to determine the optimum configuration. The simulated results are found within about 2% of the calculated values, which indicates the validity of lumped element approach. The stability of the accelerometer is also determined in the desired range of operation including the condition under shock.
Abstract: In this paper, design, fabrication and coupled
multifield analysis of hollow out-of-plane silicon microneedle array
with piezoelectrically actuated microfluidic device for transdermal
drug delivery (TDD) applications is presented. The fabrication
process of silicon microneedle array is first done by series of
combined isotropic and anisotropic etching processes using
inductively coupled plasma (ICP) etching technology. Then coupled
multifield analysis of MEMS based piezoelectrically actuated device
with integrated 2×2 silicon microneedle array is presented. To predict
the stress distribution and model fluid flow in coupled field analysis,
finite element (FE) and computational fluid dynamic (CFD) analysis
using ANSYS rather than analytical systems has been performed.
Static analysis and transient CFD analysis were performed to predict
the fluid flow through the microneedle array. The inlet pressure from
10 kPa to 150 kPa was considered for static CFD analysis. In the
lumen region fluid flow rate 3.2946 μL/min is obtained at 150 V for
2×2 microneedle array. In the present study the authors have
performed simulation of structural, piezoelectric and CFD analysis
on three dimensional model of the piezoelectrically actuated
mcirofluidic device integrated with 2×2 microneedle array.
Abstract: Rarefied gas flows are often occurred in micro electro
mechanical systems and classical CFD could not precisely anticipate
the flow and thermal behavior due to the high Knudsen number.
Therefore, the heat transfer and the fluid dynamics characteristics of
rarefied gas flows in both a two-dimensional simple microchannel
and geometry similar to single Knudsen compressor have been
investigated with a goal of increasing performance of a actual
Knudsen compressor by using a particle simulation method. Thermal
transpiration and thermal creep, which are rarefied gas dynamic
phenomena, that cause movement of the flow from less to higher
temperature is generated by using two different longitude temperature
gradients (Linear, Step) along the walls of the flow microchannel. In
this study the influence of amount of temperature gradient and
governing pressure in various Knudsen numbers and length-to-height
ratios have been examined.
Abstract: Robust nonlinear integrated navigation of GPS and
low cost MEMS is a hot topic of research these days. A robust filter
is required to cope up with the problem of unpredictable
discontinuities and colored noises associated with low cost sensors.
H∞ filter is previously used in Extended Kalman filter and Unscented
Kalman filter frame. Unscented Kalman filter has a problem of
Cholesky matrix factorization at each step which is a very unstable
operation. To avoid this problem in this research H∞ filter is
designed in Square root Unscented filter framework and found 50%
more robust towards increased level of colored noises.
Abstract: Since MEMS gyro sensors measure not angle of rotation but angular rate, an estimator is designed to estimate the angles in many applications. Gyro and accelerometer are used to improve estimating accuracy of the angle. This paper presents a method of finding filter coefficients of the well-known estimator which is to get rotation angles from gyro and accelerometer data. In order to verify the performance of our method, the estimated angle is compared with the encoder output in a rotary pendulum system.
Abstract: What influences microsystems (MEMS) and nanosystems (NEMS) innovation teams apart from technology complexity? Based on in-depth interviews with innovators, this research explores the key influences on innovation teams in the early phases of MEMS/NEMS. Projects are rare and may last from 5 to 10 years or more from idea to concept. As fundamental technology development in MEMS/NEMS is highly complex and interdisciplinary by involving expertise from different basic and engineering disciplines, R&D is rather a 'testing of ideas' with many uncertainties than a clearly structured process. The purpose of this study is to explore the innovation teams- environment and give specific insights for future management practices. The findings are grouped into three major areas: people, know-how and experience, and market. The results highlight the importance and differences of innovation teams- composition, transdisciplinary knowledge, project evaluation and management compared to the counterparts from new product development teams.
Abstract: This paper details few mechanical modeling and
design issues of RF MEMS switches. We concentrate on an
electrostatically actuated broad side series switch; surface
micromachined with a crab leg membrane. The same results are
extended to any complex structure. With available experimental data
and fabrication results, we present the variation in dynamic
performance and compliance of the switch with reference to few
design issues, which we find are critical in deciding the dynamic
behavior of the switch, without compromise on the RF
characteristics. The optimization of pull in voltage, transient time and
resonant frequency with regard to these critical design parameters are
also presented.
Abstract: In this paper, Fabless Prototyping Methodology is
introduced for the design and analysis of MEMS devices.
Conventionally Finite Element Analysis (FEA) is performed before
system level simulation. In our proposed methodology, system level
simulation is performed earlier than FEA as it is computationally less
extensive and low cost. System level simulations are based on
equivalent behavioral models of MEMS device. Electrostatic
actuation based MEMS Microgripper is chosen as case study to
implement this methodology. This paper addresses the behavioral
model development and simulation of actuator part of an
electrostatically actuated Microgripper. Simulation results show that
the actuator part of Microgripper works efficiently for a voltage range
of 0-45V with the corresponding jaw displacement of 0-4.5425μm.
With some minor changes in design, this range can be enhanced to
15μm at 85V.
Abstract: This paper presents the design of a ring-shaped tri-axial fore sensor that can be incorporated into the tip of a guidewire for use in minimally invasive surgery (MIS). The designed sensor comprises a ring-shaped structure located at the center of four cantilever beams. The ringdesign allows surgical tools to be easily passed through which largely simplified the integration process. Silicon nanowires (SiNWs) are used aspiezoresistive sensing elementsembeddedon the four cantilevers of the sensor to detect the resistance change caused by the applied load.An integration scheme with new designed guidewire tip structure having two coils at the distal end is presented. Finite element modeling has been employed in the sensor design to find the maximum stress location in order to put the SiNWs at the high stress regions to obtain maximum output. A maximum applicable force of 5 mN is found from modeling. The interaction mechanism between the designed sensor and a steel wire has been modeled by FEM. A linear relationship between the applied load on the steel wire and the induced stress on the SiNWs were observed.
Abstract: Semiconductor materials with coatings have a wide range of applications in MEMS and NEMS. This work uses transfermatrix method for calculating the radiative properties. Dopped silicon is used and the coherent formulation is applied. The Drude model for the optical constants of doped silicon is employed. Results showed that for the visible wavelengths, more emittance occurs in greater concentrations and the reflectance decreases as the concentration increases. In these wavelengths, transmittance is negligible. Donars and acceptors act similar in visible wavelengths. The effect of wave interference can be understood by plotting the spectral properties such as reflectance or transmittance of a thin dielectric film versus the film thickness and analyzing the oscillations of properties due to constructive and destructive interferences. But this effect has not been shown at visible wavelengths. At room temperature, the scattering process is dominated by lattice scattering for lightly doped silicon, and the impurity scattering becomes important for heavily doped silicon when the dopant concentration exceeds1018cm-3 .
Abstract: PDMS (Polydimethylsiloxane) polymer is a suitable material for biological and MEMS (Microelectromechanical systems) designers, because of its biocompatibility, transparency and high resistance under plasma treatment. PDMS round channel is always been of great interest due to its ability to confine the liquid with membrane type micro valves. In this paper we are presenting a very simple way to form round shapemicrofluidic channel, which is based on reflow of positive photoresist AZ® 40 XT. With this method, it is possible to obtain channel of different height simply by varying the spin coating parameters of photoresist.