Abstract: This paper presents design and analysis of an electrothermally symmetrical actuated microgripper applicable for performing micro assembly or biological cell manipulation. Integration of micro-optics with microdevice leads to achieve extremely precise control over the operation of the device. Geometry, material, actuation, control, accuracy in measurement and temperature distribution are important factors which have to be taken into account for designing the efficient microgripper device. In this work, analyses of four different geometries are performed by means of COMSOL Multiphysics 5.2 with implementing Finite Element Methods. Then, temperature distribution along the fingertip, displacement of gripper site as well as optical efficiency vs. displacement and electrical potential are illustrated. Results show in addition to the industrial application of this device, the usage of that as a cell manipulator is possible.
Abstract: High precision in motion is required to manipulate the
micro objects in precision industries for micro assembly, cell
manipulation etc. Precision manipulation is achieved based on the
appropriate mechanism design of micro devices such as
microgrippers. Design of a compliant based mechanism is the better
option to achieve a highly precised and controlled motion. This
research article highlights the method of designing a compliant based
three fingered microgripper suitable for holding asymmetric objects.
Topological optimization technique, a systematic method is
implemented in this research work to arrive a topologically optimized
design of the mechanism needed to perform the required micro
motion of the gripper. Optimization technique has a drawback of
generating senseless regions such as node to node connectivity and
staircase effect at the boundaries. Hence, it is required to have post
processing of the design to make it manufacturable. To reduce the
effect of post processing stage and to preserve the edges of the image,
a cubic spline interpolation technique is introduced in the MATLAB
program. Structural performance of the topologically developed
mechanism design is tested using finite element method (FEM)
software. Further the microgripper structure is examined to find its
fatigue life and vibration characteristics.
Abstract: In this paper, Fabless Prototyping Methodology is
introduced for the design and analysis of MEMS devices.
Conventionally Finite Element Analysis (FEA) is performed before
system level simulation. In our proposed methodology, system level
simulation is performed earlier than FEA as it is computationally less
extensive and low cost. System level simulations are based on
equivalent behavioral models of MEMS device. Electrostatic
actuation based MEMS Microgripper is chosen as case study to
implement this methodology. This paper addresses the behavioral
model development and simulation of actuator part of an
electrostatically actuated Microgripper. Simulation results show that
the actuator part of Microgripper works efficiently for a voltage range
of 0-45V with the corresponding jaw displacement of 0-4.5425μm.
With some minor changes in design, this range can be enhanced to
15μm at 85V.