Abstract: Microcantilevers are the basic MEMS devices, which
can be used as sensors, actuators and electronics can be easily built
into them. The detection principle of microcantilever sensors is based
on the measurement of change in cantilever deflection or change in its
resonance frequency. The objective of this work is to explore the
analogies between mechanical and electrical equivalent of
microcantilever beams. Normally scientists and engineers working in
MEMS use expensive software like CoventorWare, IntelliSuite,
ANSYS/Multiphysics etc. This paper indicates the need of developing
electrical equivalent of the MEMS structure and with that, one can
have a better insight on important parameters, and their interrelation of
the MEMS structure. In this work, considering the mechanical model
of microcantilever, equivalent electrical circuit is drawn and using
force-voltage analogy, it is analyzed with circuit simulation software.
By doing so, one can gain access to powerful set of intellectual tools
that have been developed for understanding electrical circuits Later
the analysis is performed using ANSYS/Multiphysics - software based
on finite element method (FEM). It is observed that both mechanical
and electrical domain results for a rectangular microcantlevers are in
agreement with each other.
Abstract: In this paper, Fabless Prototyping Methodology is
introduced for the design and analysis of MEMS devices.
Conventionally Finite Element Analysis (FEA) is performed before
system level simulation. In our proposed methodology, system level
simulation is performed earlier than FEA as it is computationally less
extensive and low cost. System level simulations are based on
equivalent behavioral models of MEMS device. Electrostatic
actuation based MEMS Microgripper is chosen as case study to
implement this methodology. This paper addresses the behavioral
model development and simulation of actuator part of an
electrostatically actuated Microgripper. Simulation results show that
the actuator part of Microgripper works efficiently for a voltage range
of 0-45V with the corresponding jaw displacement of 0-4.5425μm.
With some minor changes in design, this range can be enhanced to
15μm at 85V.