Abstract: Microcantilevers are the basic MEMS devices, which
can be used as sensors, actuators and electronics can be easily built
into them. The detection principle of microcantilever sensors is based
on the measurement of change in cantilever deflection or change in its
resonance frequency. The objective of this work is to explore the
analogies between mechanical and electrical equivalent of
microcantilever beams. Normally scientists and engineers working in
MEMS use expensive software like CoventorWare, IntelliSuite,
ANSYS/Multiphysics etc. This paper indicates the need of developing
electrical equivalent of the MEMS structure and with that, one can
have a better insight on important parameters, and their interrelation of
the MEMS structure. In this work, considering the mechanical model
of microcantilever, equivalent electrical circuit is drawn and using
force-voltage analogy, it is analyzed with circuit simulation software.
By doing so, one can gain access to powerful set of intellectual tools
that have been developed for understanding electrical circuits Later
the analysis is performed using ANSYS/Multiphysics - software based
on finite element method (FEM). It is observed that both mechanical
and electrical domain results for a rectangular microcantlevers are in
agreement with each other.
Abstract: The objective of this work is to carryout critical
comparison of different actuation mechanisms like electrostatic,
thermal, piezoelectric, and magnetic with reference to a micro
cantilever. The relevant parameters like force generated,
displacement are compared in actuation methods. With these results,
helps in choosing the best actuation method for a particular
application. In this study, Comsol/Multiphysics software is used.
Modeling and simulation is done by considering the micro cantilever
of same dimensions as an actuator using all the above mentioned
actuation techniques. In addition to their small size, micro actuators
consume very little power and are capable of accurate results. In this
work, a comparison of actuation mechanisms is done to decide the
efficient system in micro domain.