Abstract: The objective of this work is to carryout critical
comparison of different actuation mechanisms like electrostatic,
thermal, piezoelectric, and magnetic with reference to a micro
cantilever. The relevant parameters like force generated,
displacement are compared in actuation methods. With these results,
helps in choosing the best actuation method for a particular
application. In this study, Comsol/Multiphysics software is used.
Modeling and simulation is done by considering the micro cantilever
of same dimensions as an actuator using all the above mentioned
actuation techniques. In addition to their small size, micro actuators
consume very little power and are capable of accurate results. In this
work, a comparison of actuation mechanisms is done to decide the
efficient system in micro domain.
Abstract: The porous silicon (PS), formed from the anodization
of a p+ type substrate silicon, consists of a network organized in a
pseudo-column as structure of multiple side ramifications. Structural
micro-topology can be interpreted as the fraction of the interconnected
solid phase contributing to thermal transport. The
reduction of dimensions of silicon of each nanocristallite during the
oxidation induced a reduction in thermal conductivity. Integration of
thermal sensors in the Microsystems silicon requires an effective
insulation of the sensor element. Indeed, the low thermal conductivity
of PS consists in a very promising way in the fabrication of integrated
thermal Microsystems.In this work we are interesting in the
measurements of thermal conductivity (on the surface and in depth)
of PS by the micro-Raman spectroscopy. The thermal conductivity is
studied according to the parameters of anodization (initial doping and
current density. We also, determine porosity of samples by
spectroellipsometry.