Abstract: The objective of this work is to carryout critical
comparison of different actuation mechanisms like electrostatic,
thermal, piezoelectric, and magnetic with reference to a micro
cantilever. The relevant parameters like force generated,
displacement are compared in actuation methods. With these results,
helps in choosing the best actuation method for a particular
application. In this study, Comsol/Multiphysics software is used.
Modeling and simulation is done by considering the micro cantilever
of same dimensions as an actuator using all the above mentioned
actuation techniques. In addition to their small size, micro actuators
consume very little power and are capable of accurate results. In this
work, a comparison of actuation mechanisms is done to decide the
efficient system in micro domain.