Fabless Prototyping Methodology for the Development of SOI based MEMS Microgripper
In this paper, Fabless Prototyping Methodology is
introduced for the design and analysis of MEMS devices.
Conventionally Finite Element Analysis (FEA) is performed before
system level simulation. In our proposed methodology, system level
simulation is performed earlier than FEA as it is computationally less
extensive and low cost. System level simulations are based on
equivalent behavioral models of MEMS device. Electrostatic
actuation based MEMS Microgripper is chosen as case study to
implement this methodology. This paper addresses the behavioral
model development and simulation of actuator part of an
electrostatically actuated Microgripper. Simulation results show that
the actuator part of Microgripper works efficiently for a voltage range
of 0-45V with the corresponding jaw displacement of 0-4.5425μm.
With some minor changes in design, this range can be enhanced to
15μm at 85V.
[1] Stephen D. Senturia, "CAD challenges for microsensors, microactuators
and microsystems", Proceedings of the IEEE, vol. 86, No. 8, 1998, pp.
1611-1626.
[2] Shafaat Ahmed Bazaz, "Design Methodology and Modeling Strategies
for MEMS", Bulletin of Canadian Society of Mechanical Engineers,
Sept. 2003.
[3] Rana I. Shakoor, Shafaat A. Bazaz, Y. Lai, M. M. Hasan, "Comparative
Study on Finite Element Analysis & System Model Extraction for Non-
Resonant 3-DoF Microgyroscope", The 2008 IEEE International
Behavioral Modeling and Simulation Conference , September 25-26,
2008, San Jose, California, USA.
[4] Xiezhao Lin, Zichen Chen, Ji Ying, "Macromodeling of the
Electrostatically Actuated Rectangle Plate Based On Modal Projection",
International Conference on Mechatronics and Automation, August 5-8,
2007, Harbin, China.
[5] Q. Jing, "Modeling and Simulation for Design of Suspended MEMS",
Ph.D. Thesis, Carnegie Mellons University, 2003.
[6] CoventorWare ARCHITECT, version 2008, Reference: MEMS and
Microsystems System-Level Design, Coventor. Inc.
[7] H. A. C. Tilmans, "Equivalent circuit representation of
electromechanical transducers: II. Distributed-parameter systems",
Journal of Micromechanics Microengineering (7 No. 4), pp. 285-309,
December 1997.
[8] J. V. Clark, N. Zhou, S. Brown and K.S. J. Pister, "MEMS Simulation
Using SUGAR v0.5", Solid-State Sensors and Actuators Workshop,
Hilton Head Is., SC, June 7-11, 1998, pp. 191-196.
[9] Q. Jing, T. Mukherjee and G. K. Fedder, "Schematic-Based Lumped
Parameterized Behavioral Modeling for Suspended MEMS",
International Conference on Computer Aided Design, San Jose, CA,
Nov. 10-14, 2002.
[10] G. C.Wong, G. K. Tse, Q. Jing, T. Mukherjee, G. K. Fedder, "Accuracy
and Composability in NODAS", IEEE Int. Workshop on Behavioral
Modeling and Simulation, San Jose, CA, October 7-8, 2003.
[11] Neul R, Becker U, Lorenz G, Schwarz P, Haase J, Wunsche S, "A
Modeling Approach to Include Mechanical Microsystem Components
into the System Simulation", Proceedings of Design, Automation and
Test in Europe, 23-26 Feb. 1998, pp. 510-517.
[12] G. Lorenz, R. Neul, and S. Dickmann. "Modeling of electrostatic MEMS
components", International Conference on Modeling and Simulation of
Microsystems, San Juan, April 1999, pp. 128- 131.
[13] G. Lorenz and R. Neul, "Network-Type Modeling of Micromachined
Sensor Systems", Int. Conf. on Modeling and Simulation of
Microsystems, Semiconductors, Sensors and Actuators, Santa Clara,
CA, April 6-8, 1998.
[14] G. Uma, M. Umapathy, L. Baby Vidhya, M. Maya, T. Sophia, K.
Tamilarasi, "Design and Analysis of Resonant Based Gas Sensor",
Sensors Applications Symposium, Atlanta, GA, 12-14 Feb. 2008, pp
119-121.
[15] A. Manut, M. I. Syono, "Effects of Mechanical Geometries on resonance
Sensitivity of MEMS Out-of-Plane Accelerometer", IEEE International
Conference on Semiconductor Electronics, Kuala Lumpur, 2006.
[16] Chenxu Zhao, Leran Wang and Tom J. Kazmierski, "An efficient and
accurate MEMS accelerometer model with sense finger dynamics for
applications in mixed-technology control loops", IEEE Behavioral
Modeling and Simulation Conference, September 20-21, 2007, San Jose,
CA.
[17] O. Leman, A. Chaehoi, F. Mailly, L. Latorre , P. Nouet, "Modeling and
system-level simulation of a CMOS convective accelerometer", Journal
of Solid-State Electronics, Vol. 51, 2007, pp1609-1617.
[18] O. Leman, N. Dumas, F. Mailly, L. Latorre, P. Nouet, "An approach to
integrate MEMS into high-level system design flows", 6th International
IEEE Northeast Workshop on Circuits and Systems and TAISA
Conference, Montreal, QC, 22-25 June 2008, pp 273-276.
[19] Michael Schlegel, Fouad Bennini, Jan E. Mehner, Göran Herrmann,
Dietmar M├╝ller, and Wolfram Dötzel, "Analyzing and Simulation of
MEMS in VHDL-AMS Based on Reduced-Order FE Models", IEEE
Sensors Journal, Vol. 5, No. 5, October 2005, pp 1019-1026.
[20] Keith Miller, Allen Cowen, Greg Hames, and Busbee Hardy,
"SOIMUMPs Design Handbook", Revision 4.0, MEMSCAP. Inc.
[21] Kinnan Amjad, Shafaat A. Bazaz, Yongjun Lai, "Design of an
Electrostatic MEMS Microgripper System Integrated with Force
Sensor", The 20th IEEE International Conference on Microelectronics,
Sharjah, 14-17 Dec., 2008.
[22] Felix Beyeler, Adrian Neild, Stefano Oberti, Dominik J. Bell, Yu Sun,
J├╝rg Dual, Bradley J. Nelson, "Monolithically Fabricated Microgripper
With Integrated Force Sensor for Manipulating Microobjects and
Biological Cells Aligned in an Ultrasonic Field", Journal of
Microelectromechanical Systems, Vol.16, No.1, Feb. 2007, pp 7-15.
[1] Stephen D. Senturia, "CAD challenges for microsensors, microactuators
and microsystems", Proceedings of the IEEE, vol. 86, No. 8, 1998, pp.
1611-1626.
[2] Shafaat Ahmed Bazaz, "Design Methodology and Modeling Strategies
for MEMS", Bulletin of Canadian Society of Mechanical Engineers,
Sept. 2003.
[3] Rana I. Shakoor, Shafaat A. Bazaz, Y. Lai, M. M. Hasan, "Comparative
Study on Finite Element Analysis & System Model Extraction for Non-
Resonant 3-DoF Microgyroscope", The 2008 IEEE International
Behavioral Modeling and Simulation Conference , September 25-26,
2008, San Jose, California, USA.
[4] Xiezhao Lin, Zichen Chen, Ji Ying, "Macromodeling of the
Electrostatically Actuated Rectangle Plate Based On Modal Projection",
International Conference on Mechatronics and Automation, August 5-8,
2007, Harbin, China.
[5] Q. Jing, "Modeling and Simulation for Design of Suspended MEMS",
Ph.D. Thesis, Carnegie Mellons University, 2003.
[6] CoventorWare ARCHITECT, version 2008, Reference: MEMS and
Microsystems System-Level Design, Coventor. Inc.
[7] H. A. C. Tilmans, "Equivalent circuit representation of
electromechanical transducers: II. Distributed-parameter systems",
Journal of Micromechanics Microengineering (7 No. 4), pp. 285-309,
December 1997.
[8] J. V. Clark, N. Zhou, S. Brown and K.S. J. Pister, "MEMS Simulation
Using SUGAR v0.5", Solid-State Sensors and Actuators Workshop,
Hilton Head Is., SC, June 7-11, 1998, pp. 191-196.
[9] Q. Jing, T. Mukherjee and G. K. Fedder, "Schematic-Based Lumped
Parameterized Behavioral Modeling for Suspended MEMS",
International Conference on Computer Aided Design, San Jose, CA,
Nov. 10-14, 2002.
[10] G. C.Wong, G. K. Tse, Q. Jing, T. Mukherjee, G. K. Fedder, "Accuracy
and Composability in NODAS", IEEE Int. Workshop on Behavioral
Modeling and Simulation, San Jose, CA, October 7-8, 2003.
[11] Neul R, Becker U, Lorenz G, Schwarz P, Haase J, Wunsche S, "A
Modeling Approach to Include Mechanical Microsystem Components
into the System Simulation", Proceedings of Design, Automation and
Test in Europe, 23-26 Feb. 1998, pp. 510-517.
[12] G. Lorenz, R. Neul, and S. Dickmann. "Modeling of electrostatic MEMS
components", International Conference on Modeling and Simulation of
Microsystems, San Juan, April 1999, pp. 128- 131.
[13] G. Lorenz and R. Neul, "Network-Type Modeling of Micromachined
Sensor Systems", Int. Conf. on Modeling and Simulation of
Microsystems, Semiconductors, Sensors and Actuators, Santa Clara,
CA, April 6-8, 1998.
[14] G. Uma, M. Umapathy, L. Baby Vidhya, M. Maya, T. Sophia, K.
Tamilarasi, "Design and Analysis of Resonant Based Gas Sensor",
Sensors Applications Symposium, Atlanta, GA, 12-14 Feb. 2008, pp
119-121.
[15] A. Manut, M. I. Syono, "Effects of Mechanical Geometries on resonance
Sensitivity of MEMS Out-of-Plane Accelerometer", IEEE International
Conference on Semiconductor Electronics, Kuala Lumpur, 2006.
[16] Chenxu Zhao, Leran Wang and Tom J. Kazmierski, "An efficient and
accurate MEMS accelerometer model with sense finger dynamics for
applications in mixed-technology control loops", IEEE Behavioral
Modeling and Simulation Conference, September 20-21, 2007, San Jose,
CA.
[17] O. Leman, A. Chaehoi, F. Mailly, L. Latorre , P. Nouet, "Modeling and
system-level simulation of a CMOS convective accelerometer", Journal
of Solid-State Electronics, Vol. 51, 2007, pp1609-1617.
[18] O. Leman, N. Dumas, F. Mailly, L. Latorre, P. Nouet, "An approach to
integrate MEMS into high-level system design flows", 6th International
IEEE Northeast Workshop on Circuits and Systems and TAISA
Conference, Montreal, QC, 22-25 June 2008, pp 273-276.
[19] Michael Schlegel, Fouad Bennini, Jan E. Mehner, Göran Herrmann,
Dietmar M├╝ller, and Wolfram Dötzel, "Analyzing and Simulation of
MEMS in VHDL-AMS Based on Reduced-Order FE Models", IEEE
Sensors Journal, Vol. 5, No. 5, October 2005, pp 1019-1026.
[20] Keith Miller, Allen Cowen, Greg Hames, and Busbee Hardy,
"SOIMUMPs Design Handbook", Revision 4.0, MEMSCAP. Inc.
[21] Kinnan Amjad, Shafaat A. Bazaz, Yongjun Lai, "Design of an
Electrostatic MEMS Microgripper System Integrated with Force
Sensor", The 20th IEEE International Conference on Microelectronics,
Sharjah, 14-17 Dec., 2008.
[22] Felix Beyeler, Adrian Neild, Stefano Oberti, Dominik J. Bell, Yu Sun,
J├╝rg Dual, Bradley J. Nelson, "Monolithically Fabricated Microgripper
With Integrated Force Sensor for Manipulating Microobjects and
Biological Cells Aligned in an Ultrasonic Field", Journal of
Microelectromechanical Systems, Vol.16, No.1, Feb. 2007, pp 7-15.
@article{"International Journal of Mechanical, Industrial and Aerospace Sciences:50391", author = "H. M. Usman Sani and Shafaat A. Bazaz and Nisar Ahmed", title = "Fabless Prototyping Methodology for the Development of SOI based MEMS Microgripper", abstract = "In this paper, Fabless Prototyping Methodology is
introduced for the design and analysis of MEMS devices.
Conventionally Finite Element Analysis (FEA) is performed before
system level simulation. In our proposed methodology, system level
simulation is performed earlier than FEA as it is computationally less
extensive and low cost. System level simulations are based on
equivalent behavioral models of MEMS device. Electrostatic
actuation based MEMS Microgripper is chosen as case study to
implement this methodology. This paper addresses the behavioral
model development and simulation of actuator part of an
electrostatically actuated Microgripper. Simulation results show that
the actuator part of Microgripper works efficiently for a voltage range
of 0-45V with the corresponding jaw displacement of 0-4.5425μm.
With some minor changes in design, this range can be enhanced to
15μm at 85V.", keywords = "MEMS Actuator, Behavioral Model,CoventorWare, Microgripper, SOIMUMPs, System Level Simulation", volume = "4", number = "4", pages = "351-5", }
