Characterization and Modeling of Piezoelectric Integrated Micro Speakers for Audio Acoustic Actuation
An array of piezoelectric micro actuators can be used
for radiation of an ultrasonic carrier signal modulated in amplitude
with an acoustic signal, which yields audio frequency applications as
the air acts as a self-demodulating medium. This application is
known as the parametric array. We propose a parametric array with
array elements based on existing piezoelectric micro ultrasonic
transducer (pMUT) design techniques. In order to reach enough
acoustic output power at a desired operating frequency, a proper ratio
between number of array elements and array size needs to be used,
with an array total area of the order of one cm square. The
transducers presented are characterized via impedance, admittance,
noise figure, transducer gain and frequency responses.
[1] M. F. Hamilton, "Audio parametric arrays in air," The Journal of the
Acoustical Society of America, vol. 125, pp. 2688-2688, 2009.
[2] P. J. Westervelt, "Parametric acoustic array," Journal of The Acoustical
Society of America, vol. 35, pp. 535-&, 1963 1963.
[3] W. S. Liu and Z. X. Xu, "Propagation of the difference frequency wave
generated by a truncated parametric array through a water sediment
interface," Journal of The Acoustical Society of America, vol. 89, pp.
92-97, Jan 1991.
[4] K. L. Williams, L. J. Satkowiak, and D. R. Bugler, "Linear and
parametric array transmission across water-sand interface - Theory,
experiment and observation of beam displacement," Journal of The
Acoustical Society of America, vol. 86, pp. 311-325, Jul 1989.
[5] J. M. Huckabay, "An experimental study of parametric acoustic arrays
with intermediate directivity in water," Journal of The Acoustical
Society of America, vol. 67, pp. 1480-1485, 1980 1980.
[6] L. Bjorno, J. Folsberg, and L. Pedersen, "Parametric arrays in shallow
water," Journal De Physique, vol. 41, pp. 71-82, 1979 1979.
[7] J. R. Clynch and T. G. Muir, "Application of parametric arrays to
shallow-water propagation," Journal of The Acoustical Society of
America, vol. 57, pp. S64-S64, 1975 1975.
[8] F. J. Pompei, "The use of airborne ultrasonics for generating audible
sound beams," Journal of The Audio Engineering Society, vol. 47, pp.
726-731, Sep 1999.
[9] M. Yoneyama, J.-i. Fujimoto, Y. Kawamo, and S. Sasabe, "The audio
spotlight: An application of nonlinear interaction of sound waves to a
new type of loudspeaker design," The Journal of the Acoustical Society
of America, vol. 73, pp. 1532-1536, 1983.
[10] M. B. Bennett and D. T. Blackstock, "Parametric array in air," The
Journal of the Acoustical Society of America, vol. 57, pp. 562-568,
1975.
[11] T. D. Kite, J. T. Post, and M. F. Hamilton, "Parametric array in air:
Distortion reduction by preprocessing," The Journal of the Acoustical
Society of America, vol. 103, pp. 2871-2871, 1998.
[12] Y. W. Kim and S. il Kim, "Novel preprocessing technique to improve
harmonic distortion in airborne parametric array," 2002 6th International
Conference on Signal Processing Proceedings, Vols I and Ii, pp. 1815-
1818, 2002.
[13] Y. H. Liew, K. Lee, F. A. Karnapi, and W. S. Gan, "Using psychoacoustics
frequency masking to reduce distortion in a parametric array
speaker," The Journal of the Acoustical Society of America, vol. 110,
pp. 2741-2741, 2001.
[14] P. Ji, E.-L. Tan, and W.-S. Gan, "A Comparative Analysis of
Preprocessing Methods for the Parametric Loudspeaker Based on the
Khokhlov-Zabolotskaya-Kuznetsov Equation for Speech
Reproduction," IEEE Transactions on Audio, Speech and Language
Processing, vol. 19, pp. 937-946, 2011.
[15] I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, M. S. Wochner,
G. G. Yaralioglu, M. F. Hamilton, and B. T. Khuri-Yakub, "50 kHz
capacitive micromachined ultrasonic transducers for generation of highly
directional sound with parametric arrays " IEEE Transactions on
Ultrasonics, Ferroelectrics and Frequency Control, vol. 56, pp. 193 -
203, 2009.
[16] I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, M. S. Wochner,
G. G. Yaralioglu, M. F. Hamilton, and B. T. Khuri-Yakub, "Capacitive
micromachined ultrasonic transducers for generation of highly
directional sound with a parametric array," The Journal of the Acoustical
Society of America, vol. 123, pp. 3375-3375, 2008.
[17] Z. Wang, J. Miao, and W. Zhu, "Micromachined ultrasonic transducers
and arrays based on piezoelectric thick film " Applied Physics A:
Material Science and Processing, vol. 91, pp. 107-117, 2008.
[18] P. Muralt, N. Ledermann, J. Baborowski, B. A., S. Gentil, B. Belgacem,
S. Petitgrand, A. Bosseboeuf, and N. Setter, "Piezoelectric
micromachined ultrasonic transducers based on PZT thin films," IEEE
Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.
52, pp. 2276-2288, 2005.
[19] R. O. Cleveland, M. F. Hamilton, and D. T. Blackstock, "Time-domain
modeling of finite-amplitude sound in relaxing fluids," Journal of The
Acoustical Society of America, vol. 99, pp. 3312-3318, Jun 1996.
[20] Y. S. Lee and M. F. Hamilton, "Time-domain modeling of pulsed finiteamplitude
sound beams," Journal of The Acoustical Society of America,
vol. 97, pp. 906-917, 1995.
[21] T. Christopher, "Finite amplitude distortion-based inhomogeneous pulse
echo ultrasonic imaging," Ieee Transactions on Ultrasonics
Ferroelectrics and Frequency Control, vol. 44, pp. 125-139, Jan 1997.
[22] "IEEE Standard on Piezoelectricity ANSI/IEEE Std 176-1987," IEEE
Ultrasonics, Ferroelectrics, and Frequency Control Society, 1987.
[23] S. A. N. Prasad, Q. Gallas, S. Horowitz, B. Homeijer, B. V. Sankar, L.
N. Cattafesta, and M. Sheplak, "Analytical Electroacoustic Model of a
Piezoelectric Composite Circular Plate," AIAA Journal, vol. 44, pp.
2311-2318, 2006.
[24] E. Hong, S. Trolier-McKinstry, R. Smith, S. V. Krishnaswamy, and C.
B. Freidhoff, "Vibration of micomachined circular piezoelectric
diaphragms," IEEE Transactions on Ultrasonics, Ferroelectrics and
Frequency Control, vol. 53, pp. 697-705, 2006.
[25] G. Anderson, "On the determination of finite integral transforms for
forced vibrations of circular plates," Journal of Sound and Vibration,
vol. 9, pp. 126-144, 1969.
[26] S. Kopuz, Y. S. Unlusoy, and M. Caliskan, "Integrated FEM/BEM
approach to the dynamic and acoustic analysis of plate structures,"
Engineering Analysis with Boundary Elements, vol. 17, pp. 269-277,
1996.
[1] M. F. Hamilton, "Audio parametric arrays in air," The Journal of the
Acoustical Society of America, vol. 125, pp. 2688-2688, 2009.
[2] P. J. Westervelt, "Parametric acoustic array," Journal of The Acoustical
Society of America, vol. 35, pp. 535-&, 1963 1963.
[3] W. S. Liu and Z. X. Xu, "Propagation of the difference frequency wave
generated by a truncated parametric array through a water sediment
interface," Journal of The Acoustical Society of America, vol. 89, pp.
92-97, Jan 1991.
[4] K. L. Williams, L. J. Satkowiak, and D. R. Bugler, "Linear and
parametric array transmission across water-sand interface - Theory,
experiment and observation of beam displacement," Journal of The
Acoustical Society of America, vol. 86, pp. 311-325, Jul 1989.
[5] J. M. Huckabay, "An experimental study of parametric acoustic arrays
with intermediate directivity in water," Journal of The Acoustical
Society of America, vol. 67, pp. 1480-1485, 1980 1980.
[6] L. Bjorno, J. Folsberg, and L. Pedersen, "Parametric arrays in shallow
water," Journal De Physique, vol. 41, pp. 71-82, 1979 1979.
[7] J. R. Clynch and T. G. Muir, "Application of parametric arrays to
shallow-water propagation," Journal of The Acoustical Society of
America, vol. 57, pp. S64-S64, 1975 1975.
[8] F. J. Pompei, "The use of airborne ultrasonics for generating audible
sound beams," Journal of The Audio Engineering Society, vol. 47, pp.
726-731, Sep 1999.
[9] M. Yoneyama, J.-i. Fujimoto, Y. Kawamo, and S. Sasabe, "The audio
spotlight: An application of nonlinear interaction of sound waves to a
new type of loudspeaker design," The Journal of the Acoustical Society
of America, vol. 73, pp. 1532-1536, 1983.
[10] M. B. Bennett and D. T. Blackstock, "Parametric array in air," The
Journal of the Acoustical Society of America, vol. 57, pp. 562-568,
1975.
[11] T. D. Kite, J. T. Post, and M. F. Hamilton, "Parametric array in air:
Distortion reduction by preprocessing," The Journal of the Acoustical
Society of America, vol. 103, pp. 2871-2871, 1998.
[12] Y. W. Kim and S. il Kim, "Novel preprocessing technique to improve
harmonic distortion in airborne parametric array," 2002 6th International
Conference on Signal Processing Proceedings, Vols I and Ii, pp. 1815-
1818, 2002.
[13] Y. H. Liew, K. Lee, F. A. Karnapi, and W. S. Gan, "Using psychoacoustics
frequency masking to reduce distortion in a parametric array
speaker," The Journal of the Acoustical Society of America, vol. 110,
pp. 2741-2741, 2001.
[14] P. Ji, E.-L. Tan, and W.-S. Gan, "A Comparative Analysis of
Preprocessing Methods for the Parametric Loudspeaker Based on the
Khokhlov-Zabolotskaya-Kuznetsov Equation for Speech
Reproduction," IEEE Transactions on Audio, Speech and Language
Processing, vol. 19, pp. 937-946, 2011.
[15] I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, M. S. Wochner,
G. G. Yaralioglu, M. F. Hamilton, and B. T. Khuri-Yakub, "50 kHz
capacitive micromachined ultrasonic transducers for generation of highly
directional sound with parametric arrays " IEEE Transactions on
Ultrasonics, Ferroelectrics and Frequency Control, vol. 56, pp. 193 -
203, 2009.
[16] I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, M. S. Wochner,
G. G. Yaralioglu, M. F. Hamilton, and B. T. Khuri-Yakub, "Capacitive
micromachined ultrasonic transducers for generation of highly
directional sound with a parametric array," The Journal of the Acoustical
Society of America, vol. 123, pp. 3375-3375, 2008.
[17] Z. Wang, J. Miao, and W. Zhu, "Micromachined ultrasonic transducers
and arrays based on piezoelectric thick film " Applied Physics A:
Material Science and Processing, vol. 91, pp. 107-117, 2008.
[18] P. Muralt, N. Ledermann, J. Baborowski, B. A., S. Gentil, B. Belgacem,
S. Petitgrand, A. Bosseboeuf, and N. Setter, "Piezoelectric
micromachined ultrasonic transducers based on PZT thin films," IEEE
Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.
52, pp. 2276-2288, 2005.
[19] R. O. Cleveland, M. F. Hamilton, and D. T. Blackstock, "Time-domain
modeling of finite-amplitude sound in relaxing fluids," Journal of The
Acoustical Society of America, vol. 99, pp. 3312-3318, Jun 1996.
[20] Y. S. Lee and M. F. Hamilton, "Time-domain modeling of pulsed finiteamplitude
sound beams," Journal of The Acoustical Society of America,
vol. 97, pp. 906-917, 1995.
[21] T. Christopher, "Finite amplitude distortion-based inhomogeneous pulse
echo ultrasonic imaging," Ieee Transactions on Ultrasonics
Ferroelectrics and Frequency Control, vol. 44, pp. 125-139, Jan 1997.
[22] "IEEE Standard on Piezoelectricity ANSI/IEEE Std 176-1987," IEEE
Ultrasonics, Ferroelectrics, and Frequency Control Society, 1987.
[23] S. A. N. Prasad, Q. Gallas, S. Horowitz, B. Homeijer, B. V. Sankar, L.
N. Cattafesta, and M. Sheplak, "Analytical Electroacoustic Model of a
Piezoelectric Composite Circular Plate," AIAA Journal, vol. 44, pp.
2311-2318, 2006.
[24] E. Hong, S. Trolier-McKinstry, R. Smith, S. V. Krishnaswamy, and C.
B. Freidhoff, "Vibration of micomachined circular piezoelectric
diaphragms," IEEE Transactions on Ultrasonics, Ferroelectrics and
Frequency Control, vol. 53, pp. 697-705, 2006.
[25] G. Anderson, "On the determination of finite integral transforms for
forced vibrations of circular plates," Journal of Sound and Vibration,
vol. 9, pp. 126-144, 1969.
[26] S. Kopuz, Y. S. Unlusoy, and M. Caliskan, "Integrated FEM/BEM
approach to the dynamic and acoustic analysis of plate structures,"
Engineering Analysis with Boundary Elements, vol. 17, pp. 269-277,
1996.
@article{"International Journal of Electrical, Electronic and Communication Sciences:58762", author = "J. Mendoza-López and S. Sánchez-Solano and J. L. Huertas-Díaz", title = "Characterization and Modeling of Piezoelectric Integrated Micro Speakers for Audio Acoustic Actuation", abstract = "An array of piezoelectric micro actuators can be used
for radiation of an ultrasonic carrier signal modulated in amplitude
with an acoustic signal, which yields audio frequency applications as
the air acts as a self-demodulating medium. This application is
known as the parametric array. We propose a parametric array with
array elements based on existing piezoelectric micro ultrasonic
transducer (pMUT) design techniques. In order to reach enough
acoustic output power at a desired operating frequency, a proper ratio
between number of array elements and array size needs to be used,
with an array total area of the order of one cm square. The
transducers presented are characterized via impedance, admittance,
noise figure, transducer gain and frequency responses.", keywords = "Pizeoelectric, Microspeaker, MEMS, pMUT,
Parametric Array", volume = "5", number = "10", pages = "1360-7", }
