Coupled Multifield Analysis of Piezoelectrically Actuated Microfluidic Device for Transdermal Drug Delivery Applications

In this paper, design, fabrication and coupled multifield analysis of hollow out-of-plane silicon microneedle array with piezoelectrically actuated microfluidic device for transdermal drug delivery (TDD) applications is presented. The fabrication process of silicon microneedle array is first done by series of combined isotropic and anisotropic etching processes using inductively coupled plasma (ICP) etching technology. Then coupled multifield analysis of MEMS based piezoelectrically actuated device with integrated 2×2 silicon microneedle array is presented. To predict the stress distribution and model fluid flow in coupled field analysis, finite element (FE) and computational fluid dynamic (CFD) analysis using ANSYS rather than analytical systems has been performed. Static analysis and transient CFD analysis were performed to predict the fluid flow through the microneedle array. The inlet pressure from 10 kPa to 150 kPa was considered for static CFD analysis. In the lumen region fluid flow rate 3.2946 μL/min is obtained at 150 V for 2×2 microneedle array. In the present study the authors have performed simulation of structural, piezoelectric and CFD analysis on three dimensional model of the piezoelectrically actuated mcirofluidic device integrated with 2×2 microneedle array.

Low cost Nano-membrane Fabrication and Electro-polishing System

This paper presents the development of low cost Nano membrane fabrication system. The system is specially designed for anodic aluminum oxide membrane. This system is capable to perform the processes such as anodization and electro-polishing. The designed machine was successfully tested for 'mild anodization' (MA) for 48 hours and 'hard anodization' (HA) for 3 hours at constant 0oC. The system is digitally controlled and guided for temperature maintenance during anodization and electro-polishing. The total cost of the developed machine is 20 times less than the multi-cooling systems available in the market which are generally used for this purpose.