Abstract: Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,
we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon
dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.
Abstract: Speckle phenomena results from when coherent
radiation is reflected from a rough surface. Characterizing the speckle
strongly depends on the measurement condition and experimental
setup. In this paper we report the experimental results produced with
different parameters in the setup. We investigated the factors which
affects the speckle contrast, such as, F-number, gamma value and
exposure time of the camera, rather than geometric factors like the
distance between the projector lens to the screen, the viewing distance,
etc. The measurement results show that the speckle contrast decreases
by decreasing F-number, by increasing gamma value, and slightly
affects by exposure time of the camera and the gain value of the
camera.