Abstract: Acoustic sensors are extensively used in recent days not only for sensing and condition monitoring applications but also for small scale energy harvesting applications to power wireless sensor networks (WSN) due to their inherent advantages. The natural frequency of the structure plays a major role in energy harvesting applications since the sensor key element has to operate at resonant frequency. In this paper, circular diaphragm based MEMS acoustic sensor is modelled by Lumped Element Model (LEM) and the natural frequency is compared with the simulated model using Finite Element Method (FEM) tool COMSOL Multiphysics. The sensor has the circular diaphragm of 3000 µm radius and thickness of 30 µm to withstand the high SPL (Sound Pressure Level) and also to withstand the various fabrication steps. A Piezoelectric ZnO layer of thickness of 1 µm sandwiched between two aluminium electrodes of thickness 0.5 µm and is coated on the diaphragm. Further, a channel with radius 3000 µm radius and length 270 µm is connected at the bottom of the diaphragm. The natural frequency of the structure by LEM method is approximately 16.6 kHz which is closely matching with that of simulated structure with suitable approximations.
Abstract: Electrical current measurement is a suitable method for the performance determination of electrical devices. There are two contact and noncontact methods in this measuring process. Contact method has some disadvantages like having direct connection with wire which may endamage the system. Thus, in this paper, a bimorph piezoelectric cantilever beam which has a permanent magnet on its free end is used to measure electrical current in a noncontact way. In mathematical modeling, based on Galerkin method, the governing equation of the cantilever beam is solved, and the equation presenting the relation between applied force and beam’s output voltage is presented. Magnetic force resulting from current carrying wire is considered as the external excitation force of the system. The results are compared with other references in order to demonstrate the accuracy of the mathematical model. Finally, the effects of geometric parameters on the output voltage and natural frequency are presented.
Abstract: This paper applies the MEMS technology to design and fabricate a micro-bubble generator by a piezoelectric actuator. Coupled with a nickel nozzle plate, an annular piezoelectric ceramic was utilized as the primary structure of the generator. In operations, the piezoelectric element deforms transversely under an electric field applied across the thickness of the generator. The surface of the nozzle plate can expand or contract because of the induction of radial strain, resulting in the whole structure to bend, and successively transport oxygen micro-bubbles into the blood flow for enhancing the oxygen content in blood. In the tests, a high magnification microscope and a high speed CCD camera were employed to photograph the time evolution of meniscus shape of gaseous bubbles dispensed from the micro-bubble generator for flow visualization. This investigation thus explored the bubble formation process including the influences of inlet gas pressure along with driving voltage and resonance frequency on the formed bubble extent.
Abstract: This paper presents the design and fabrication of a
novel piezoelectric actuator for a gas micro pump with check valve
having the advantages of miniature size, light weight and low power
consumption. The micro pump is designed to have eight major
components, namely a stainless steel upper cover layer, a piezoelectric
actuator, a stainless steel diaphragm, a PDMS chamber layer, two
stainless steel channel layers with two valve seats, a PDMS check
valve layer with two cantilever-type check valves and an acrylic
substrate. A prototype of the gas micro pump, with a size of 52 mm ×
50 mm × 5.0 mm, is fabricated by precise manufacturing. This device
is designed to pump gases with the capability of performing the
self-priming and bubble-tolerant work mode by maximizing the stroke
volume of the membrane as well as the compression ratio via
minimization of the dead volume of the micro pump chamber and
channel. By experiment apparatus setup, we can get the real-time
values of the flow rate of micro pump and the displacement of the
piezoelectric actuator, simultaneously. The gas micro pump obtained
higher output performance under the sinusoidal waveform of 250 Vpp.
The micro pump achieved the maximum pumping rates of 1185
ml/min and back pressure of 7.14 kPa at the corresponding frequency
of 120 and 50 Hz.
Abstract: This paper reports a novel actuating design that uses
the shear deformation of a piezoelectric actuator to deflect a
bulge-diaphragm for driving an array microdroplet ejector. In essence,
we employed a circular-shaped actuator poled radial direction with
remnant polarization normal to the actuating electric field for inducing
the piezoelectric shear effect. The array microdroplet ejector consists
of a shear type piezoelectric actuator, a vibration plate, two chamber
plates, two channel plates and a nozzle plate. The vibration, chamber
and nozzle plate components are fabricated using nickel
electroforming technology, whereas the channel plate is fabricated by
etching of stainless steel. The diaphragm displacement was measured
by the laser two-dimensional scanning vibrometer. The ejected
droplets of the microejector were also observed via an optic
visualization system.
Abstract: This paper aims to present the design, fabrication and test of a novel piezoelectric actuated, check-valves embedded micropump having the advantages of miniature size, light weight and low power consumption. This device is designed to pump gases and liquids with the capability of performing the self-priming and bubble-tolerant work mode by maximizing the stroke volume of the membrane as well as the compression ratio via minimization of the dead volume of the micropump chamber and channel. By experiment apparatus setup, we can get the real-time values of the flow rate of micropump, the displacement of the piezoelectric actuator and the deformation of the check valve, simultaneously. The micropump with check valve 0.4 mm in thickness obtained higher output performance under the sinusoidal waveform of 120 Vpp. The micropump achieved the maximum pumping rates of 42.2 ml/min and back pressure of 14.0 kPa at the corresponding frequency of 28 and 20 Hz. The presented micropump is able to pump gases with a pumping rate of 196 ml/min at operating frequencies of 280 Hz under the sinusoidal waveform of 120 Vpp.
Abstract: Analytical investigation of the free vibration behavior
of circular functionally graded (FG) plates integrated with two
uniformly distributed actuator layers made of piezoelectric (PZT4)
material on the top and bottom surfaces of the circular FG plate
based on the classical plate theory (CPT) is presented in this paper.
The material properties of the functionally graded substrate plate are
assumed to be graded in the thickness direction according to the
power-law distribution in terms of the volume fractions of the
constituents and the distribution of electric potential field along the
thickness direction of piezoelectric layers is simulated by a quadratic
function. The differential equations of motion are solved analytically
for clamped edge boundary condition of the plate. The detailed
mathematical derivations are presented and Numerical investigations
are performed for FG plates with two surface-bonded piezoelectric
layers. Emphasis is placed on investigating the effect of varying the
gradient index of FG plate on the free vibration characteristics of the
structure. The results are verified by those obtained from threedimensional
finite element analyses.