Development of Piezoelectric Gas Micro Pumps with the PDMS Check Valve Design
This paper presents the design and fabrication of a
novel piezoelectric actuator for a gas micro pump with check valve
having the advantages of miniature size, light weight and low power
consumption. The micro pump is designed to have eight major
components, namely a stainless steel upper cover layer, a piezoelectric
actuator, a stainless steel diaphragm, a PDMS chamber layer, two
stainless steel channel layers with two valve seats, a PDMS check
valve layer with two cantilever-type check valves and an acrylic
substrate. A prototype of the gas micro pump, with a size of 52 mm ×
50 mm × 5.0 mm, is fabricated by precise manufacturing. This device
is designed to pump gases with the capability of performing the
self-priming and bubble-tolerant work mode by maximizing the stroke
volume of the membrane as well as the compression ratio via
minimization of the dead volume of the micro pump chamber and
channel. By experiment apparatus setup, we can get the real-time
values of the flow rate of micro pump and the displacement of the
piezoelectric actuator, simultaneously. The gas micro pump obtained
higher output performance under the sinusoidal waveform of 250 Vpp.
The micro pump achieved the maximum pumping rates of 1185
ml/min and back pressure of 7.14 kPa at the corresponding frequency
of 120 and 50 Hz.
[1] H Kim, W H Steinecker, G R Lambertus, A A Astle, K Najafi, E T Zellers,
L Bernal, P Washabaugh, K D Wise, “Integrated high-pressure 4-stage
micro pump for high speed micro chromatography,” Proc. 10th Int. Conf.
Miniaturized Systems for Chemistry and Life Science (uTAS ’06),
Tokyo, Japan, pp. 1037–1039, 2006.
[2] P Rodgers, V Eveloy, M Pecht, “Extending the limits of aircooling in
microelectronic equipment,” Proc. 6th Int. Conf. Thermal, Mechanical
and Multiphysics Simulation and Experiment in Micro-electronics and
Micro-systems, EuroSimE, Berlin, Germany, pp. 695–701, 2005.
[3] Y Wang, G Yuan, Y K Yoon, M G Allen, S A Bidstrup, “Large eddy
simulation (LES) for synthetic jet thermal management,” Int. J. Heat
Mass Transfer, Vol. 49, pp. 2173–2179, 2006.
[4] L Arana, S Schaevitz, A Franz, M A Schmidt, K F Jensen, “A
microfabricated suspended-tube chemical reactor for thermally efficient
fuel processing,” J. Microelectromech. Syst. Vol. 12, pp. 600–612, 2003.
[5] N T Nguyen, X Huang and T K Chuan, “MEMS-micro pumps: a review,”
ASME J. Fluids Eng. Vol. 124, pp. 384-392, 2002.
[6] D J Laser and J G Santiago, “A review of micro pumps,” J. Micromech.
Microeng. Vol. 14, pp. R35–R64, 2004.
[7] P Woias, “Micro pumps-past, progress and future prospects,” Sensors
Actuators B Vol. 105, pp. 28–38, 2005.
[8] H Kim, K Najafi, L P Bernal, “Gas micro pumps, “ in: Y. Gianchandani,
O. Tabata, H. Zappe (Eds.), Comprehensive Microsystems, vol. 2,
Elsevier Ltd., The Netherlands, pp. 273-299, 2008.
[9] L Chen, S Lee, J Choo and E K Lee, “Continuous dynamic flow micro
pumps for microfluid manipulation,” J. Micromech. Microeng. Vol. 18,
pp. 1–22, 2008.
[10] F Amirouche, Y Zhou and T Johnson, “Current micro pump technologies
and their biomedical applications,” Microsyst. Technol. Vol. 15 pp.
647-666, 2009.
[11] H Andersson, W van der Wijngaart, P Nilsson, P Enoksson and G
Stemme, “A valve-less diffuser micro pump for microfluidic analytical
systems,” Sensors Actuators B Vol. 72, pp. 259–265, 2001.
[12] B Fan, G Song and F Hussain, “Simulation of a piezoelectrically actuated
valveless micro pump,” Smart Mater. Struct. Vol. 14, pp. 400–405, 2005.
[13] J Kang, J V Mantese and G W Auner, “A self-priming, high performance,
check valve diaphragm micro pump made from SOI wafers,” J.
Micromech. Microeng. Vol. 18, pp. 1-8, 2009.
[14] R. Rapp, W K Schomburg, D. Maas, J. Schulz and W. Stark, “LIGA
micro pump for gases and liquids,” Sens. Actuators A Vol. 40, pp. 57–61,
1994.
[15] S Boehm, W Olthuis and P Bergveld, “A plastic micro pump constructed
with conventional techniques and materials,” Sensors Actuators A Vol.
77, pp. 223–228, 1999.
[16] S. Santra, P. Holloway, D. Batich, “Fabrication and testing of a
magnetically actuated micro pump,” Sens. Actuators B Vol. 87, pp. 358–
364, 2002.
[17] T Q Truong and N T Nguyen, “A polymeric piezoelectric micro pump
based on lamination technology,” J. Micromech. Microeng. Vol. 14,
pp.632–638, 2004.
[18] J H Kim, K T Lau, R Shepherd, Y Wu, G Wallace and D Diamond,
“Performance characteristics of a polypyrrole modified
polydimethylsiloxane (PDMS) membrane based microfluidic pump,”
Sensors and Actuators A Vol. 148, pp. 239–244, 2008.
[1] H Kim, W H Steinecker, G R Lambertus, A A Astle, K Najafi, E T Zellers,
L Bernal, P Washabaugh, K D Wise, “Integrated high-pressure 4-stage
micro pump for high speed micro chromatography,” Proc. 10th Int. Conf.
Miniaturized Systems for Chemistry and Life Science (uTAS ’06),
Tokyo, Japan, pp. 1037–1039, 2006.
[2] P Rodgers, V Eveloy, M Pecht, “Extending the limits of aircooling in
microelectronic equipment,” Proc. 6th Int. Conf. Thermal, Mechanical
and Multiphysics Simulation and Experiment in Micro-electronics and
Micro-systems, EuroSimE, Berlin, Germany, pp. 695–701, 2005.
[3] Y Wang, G Yuan, Y K Yoon, M G Allen, S A Bidstrup, “Large eddy
simulation (LES) for synthetic jet thermal management,” Int. J. Heat
Mass Transfer, Vol. 49, pp. 2173–2179, 2006.
[4] L Arana, S Schaevitz, A Franz, M A Schmidt, K F Jensen, “A
microfabricated suspended-tube chemical reactor for thermally efficient
fuel processing,” J. Microelectromech. Syst. Vol. 12, pp. 600–612, 2003.
[5] N T Nguyen, X Huang and T K Chuan, “MEMS-micro pumps: a review,”
ASME J. Fluids Eng. Vol. 124, pp. 384-392, 2002.
[6] D J Laser and J G Santiago, “A review of micro pumps,” J. Micromech.
Microeng. Vol. 14, pp. R35–R64, 2004.
[7] P Woias, “Micro pumps-past, progress and future prospects,” Sensors
Actuators B Vol. 105, pp. 28–38, 2005.
[8] H Kim, K Najafi, L P Bernal, “Gas micro pumps, “ in: Y. Gianchandani,
O. Tabata, H. Zappe (Eds.), Comprehensive Microsystems, vol. 2,
Elsevier Ltd., The Netherlands, pp. 273-299, 2008.
[9] L Chen, S Lee, J Choo and E K Lee, “Continuous dynamic flow micro
pumps for microfluid manipulation,” J. Micromech. Microeng. Vol. 18,
pp. 1–22, 2008.
[10] F Amirouche, Y Zhou and T Johnson, “Current micro pump technologies
and their biomedical applications,” Microsyst. Technol. Vol. 15 pp.
647-666, 2009.
[11] H Andersson, W van der Wijngaart, P Nilsson, P Enoksson and G
Stemme, “A valve-less diffuser micro pump for microfluidic analytical
systems,” Sensors Actuators B Vol. 72, pp. 259–265, 2001.
[12] B Fan, G Song and F Hussain, “Simulation of a piezoelectrically actuated
valveless micro pump,” Smart Mater. Struct. Vol. 14, pp. 400–405, 2005.
[13] J Kang, J V Mantese and G W Auner, “A self-priming, high performance,
check valve diaphragm micro pump made from SOI wafers,” J.
Micromech. Microeng. Vol. 18, pp. 1-8, 2009.
[14] R. Rapp, W K Schomburg, D. Maas, J. Schulz and W. Stark, “LIGA
micro pump for gases and liquids,” Sens. Actuators A Vol. 40, pp. 57–61,
1994.
[15] S Boehm, W Olthuis and P Bergveld, “A plastic micro pump constructed
with conventional techniques and materials,” Sensors Actuators A Vol.
77, pp. 223–228, 1999.
[16] S. Santra, P. Holloway, D. Batich, “Fabrication and testing of a
magnetically actuated micro pump,” Sens. Actuators B Vol. 87, pp. 358–
364, 2002.
[17] T Q Truong and N T Nguyen, “A polymeric piezoelectric micro pump
based on lamination technology,” J. Micromech. Microeng. Vol. 14,
pp.632–638, 2004.
[18] J H Kim, K T Lau, R Shepherd, Y Wu, G Wallace and D Diamond,
“Performance characteristics of a polypyrrole modified
polydimethylsiloxane (PDMS) membrane based microfluidic pump,”
Sensors and Actuators A Vol. 148, pp. 239–244, 2008.
@article{"International Journal of Mechanical, Industrial and Aerospace Sciences:70481", author = "Chiang-Ho Cheng and An-Shik Yang and Hong-Yih Cheng and Ming-Yu Lai", title = "Development of Piezoelectric Gas Micro Pumps with the PDMS Check Valve Design", abstract = "This paper presents the design and fabrication of a
novel piezoelectric actuator for a gas micro pump with check valve
having the advantages of miniature size, light weight and low power
consumption. The micro pump is designed to have eight major
components, namely a stainless steel upper cover layer, a piezoelectric
actuator, a stainless steel diaphragm, a PDMS chamber layer, two
stainless steel channel layers with two valve seats, a PDMS check
valve layer with two cantilever-type check valves and an acrylic
substrate. A prototype of the gas micro pump, with a size of 52 mm ×
50 mm × 5.0 mm, is fabricated by precise manufacturing. This device
is designed to pump gases with the capability of performing the
self-priming and bubble-tolerant work mode by maximizing the stroke
volume of the membrane as well as the compression ratio via
minimization of the dead volume of the micro pump chamber and
channel. By experiment apparatus setup, we can get the real-time
values of the flow rate of micro pump and the displacement of the
piezoelectric actuator, simultaneously. The gas micro pump obtained
higher output performance under the sinusoidal waveform of 250 Vpp.
The micro pump achieved the maximum pumping rates of 1185
ml/min and back pressure of 7.14 kPa at the corresponding frequency
of 120 and 50 Hz.", keywords = "PDMS, Check valve, Micro pump, Piezoelectric.", volume = "9", number = "7", pages = "1272-6", }