Abstract: This paper applies the MEMS technology to design and fabricate a micro-bubble generator by a piezoelectric actuator. Coupled with a nickel nozzle plate, an annular piezoelectric ceramic was utilized as the primary structure of the generator. In operations, the piezoelectric element deforms transversely under an electric field applied across the thickness of the generator. The surface of the nozzle plate can expand or contract because of the induction of radial strain, resulting in the whole structure to bend, and successively transport oxygen micro-bubbles into the blood flow for enhancing the oxygen content in blood. In the tests, a high magnification microscope and a high speed CCD camera were employed to photograph the time evolution of meniscus shape of gaseous bubbles dispensed from the micro-bubble generator for flow visualization. This investigation thus explored the bubble formation process including the influences of inlet gas pressure along with driving voltage and resonance frequency on the formed bubble extent.
Abstract: This paper presents the design and fabrication of a
novel piezoelectric actuator for a gas micro pump with check valve
having the advantages of miniature size, light weight and low power
consumption. The micro pump is designed to have eight major
components, namely a stainless steel upper cover layer, a piezoelectric
actuator, a stainless steel diaphragm, a PDMS chamber layer, two
stainless steel channel layers with two valve seats, a PDMS check
valve layer with two cantilever-type check valves and an acrylic
substrate. A prototype of the gas micro pump, with a size of 52 mm ×
50 mm × 5.0 mm, is fabricated by precise manufacturing. This device
is designed to pump gases with the capability of performing the
self-priming and bubble-tolerant work mode by maximizing the stroke
volume of the membrane as well as the compression ratio via
minimization of the dead volume of the micro pump chamber and
channel. By experiment apparatus setup, we can get the real-time
values of the flow rate of micro pump and the displacement of the
piezoelectric actuator, simultaneously. The gas micro pump obtained
higher output performance under the sinusoidal waveform of 250 Vpp.
The micro pump achieved the maximum pumping rates of 1185
ml/min and back pressure of 7.14 kPa at the corresponding frequency
of 120 and 50 Hz.
Abstract: This paper reports a novel actuating design that uses
the shear deformation of a piezoelectric actuator to deflect a
bulge-diaphragm for driving an array microdroplet ejector. In essence,
we employed a circular-shaped actuator poled radial direction with
remnant polarization normal to the actuating electric field for inducing
the piezoelectric shear effect. The array microdroplet ejector consists
of a shear type piezoelectric actuator, a vibration plate, two chamber
plates, two channel plates and a nozzle plate. The vibration, chamber
and nozzle plate components are fabricated using nickel
electroforming technology, whereas the channel plate is fabricated by
etching of stainless steel. The diaphragm displacement was measured
by the laser two-dimensional scanning vibrometer. The ejected
droplets of the microejector were also observed via an optic
visualization system.