Abstract: There are a many of needs for the development of
SiC-based hydrogen sensor for harsh environment applications. We
fabricated and investigated Pd/Ta2O5/SiC-based hydrogen sensors
with MOS capacitor structure for high temperature process monitoring
and leak detection applications in such automotive, chemical and
petroleum industries as well as direct monitoring of combustion
processes. In this work, we used silicon carbide (SiC) as a substrate to
replace silicon which operating temperatures are limited to below
200°C. Tantalum oxide was investigated as dielectric layer which has
high permeability for hydrogen gas and high dielectric permittivity,
compared with silicon dioxide or silicon nitride. Then, electrical
response properties, such as I-V curve and dependence of capacitance
on hydrogen concentrations were analyzed in the temperature ranges
of room temperature to 500°C for performance evaluation of the
sensor.
Abstract: KSLV-I(Korea Space Launch Vehicle-I) is designed as
a launch vehicle to enter a 100 kg-class satellite to the LEO(Low Earth
Orbit). Attitude angles of the upper-stage, including roll, pitch and
yaw are controlled by the cold gas thruster system using nitrogen gas.
The cold gas thruster is an actuator in the RCS(Reaction Control
System). To design an attitude controller for the upper-stage, thrust
measurement in vacuum condition is required. In this paper, the new
thrust measurement system and calibration mechanism are developed
and measurement errors and signal processing method are presented.