Abstract: In this study, the RRAM devices with the TiN/Ti/HfOx/TiN structure were fabricated, then the electrical characteristics of the devices without annealing and after 400 °C and 500 °C of the furnace annealing (FA) temperature processes were compared. The RRAM devices after the FA’s 400 °C showed the lower forming, set and reset voltages than the other devices without annealing. However, the RRAM devices after the FA’s 500 °C did not show any electrical characteristics because the TiN/Ti/HfOx/TiN device was oxidized, as shown in the XPS analysis. From these results, the RRAM devices after the FA’s 400 °C showed the best electrical characteristics.
Abstract: High performance Resistive Random Access Memory
(RRAM) based on HfOx has been prepared and its temperature
instability has been investigated in this work. With increasing
temperature, it is found that: leakage current at high resistance state
increases, which can be explained by the higher density of traps
inside dielectrics (related to trap-assistant tunneling), leading to a
smaller On/Off ratio; set and reset voltages decrease, which may be
attributed to the higher oxygen ion mobility, in addition to the
reduced potential barrier to create / recover oxygen ions (or oxygen
vacancies); temperature impact on the RRAM retention degradation
is more serious than electrical bias.