Abstract: This paper presents design and analysis of an electrothermally symmetrical actuated microgripper applicable for performing micro assembly or biological cell manipulation. Integration of micro-optics with microdevice leads to achieve extremely precise control over the operation of the device. Geometry, material, actuation, control, accuracy in measurement and temperature distribution are important factors which have to be taken into account for designing the efficient microgripper device. In this work, analyses of four different geometries are performed by means of COMSOL Multiphysics 5.2 with implementing Finite Element Methods. Then, temperature distribution along the fingertip, displacement of gripper site as well as optical efficiency vs. displacement and electrical potential are illustrated. Results show in addition to the industrial application of this device, the usage of that as a cell manipulator is possible.
Abstract: In this paper we present a new multichannel high
voltage driver box to connect up to six MOEMS mirror devices to it that have resonant and also quasistatically driven actuating electrodes. It is possible to drive all resonant axes synchronously
while the amplitude of them can individually be controlled by separate microcontrollers that also operate the quasistatic axes.
Circuit simulations are compared with the measurements done on the
real system and also show the robust driving performance of a
MOEMS mirror.