High Voltage Driver Design for Actuating a MOEMS Mirror Array

In this paper we present a new multichannel high voltage driver box to connect up to six MOEMS mirror devices to it that have resonant and also quasistatically driven actuating electrodes. It is possible to drive all resonant axes synchronously while the amplitude of them can individually be controlled by separate microcontrollers that also operate the quasistatic axes. Circuit simulations are compared with the measurements done on the real system and also show the robust driving performance of a MOEMS mirror.

Authors:

• M. Lenzhofer
• D. Holzmann
• A. Tortschanoff

Keywords:

• MOEMS
• scanner mirror
• electrostatic driver.

References:

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