Abstract: The MEMS pressure sensor has been introduced and
presented in this paper. The types of pressure sensor and its theory of
operation are also included. The latest MEMS technology, the
fabrication processes of pressure sensor are explored and discussed.
Besides, various device applications of pressure sensor such as tire
pressure-monitoring system, diesel particulate filter and others are
explained. Due to further miniaturization of the device nowadays, the
pressure sensor with nanotechnology (NEMS) is also reviewed. The
NEMS pressure sensor is expected to have better performance as well
as lower in its cost. It has gained an excellent popularity in many
applications.