Valuation on MEMS Pressure Sensors and Device Applications
The MEMS pressure sensor has been introduced and
presented in this paper. The types of pressure sensor and its theory of
operation are also included. The latest MEMS technology, the
fabrication processes of pressure sensor are explored and discussed.
Besides, various device applications of pressure sensor such as tire
pressure-monitoring system, diesel particulate filter and others are
explained. Due to further miniaturization of the device nowadays, the
pressure sensor with nanotechnology (NEMS) is also reviewed. The
NEMS pressure sensor is expected to have better performance as well
as lower in its cost. It has gained an excellent popularity in many
applications.
[1] S. Sathyanaratanan and A. V. Juliet, “Design and Simulation of Touch
Mode MEMS Capacitive Pressure Sensor”, in IEEE International
Conference on Mechanical and Electrical Technology, pp. 180-183,
2010.
[2] J. M. Fernandez, N. Bonet, J. J. Sieiro and J. M. Lopez, “Ceramic
Capacitive Pressure Sensor Based On LTCC Technology”, in IEEE
Spanish Conference, pp. 111-114, 2013.
[3] T. Grant, V. Joshi, M. Taylor, F. Knoefel, H. Sveistrup, M. Bilodeau and
J. Jutai, “Measuring Sit-to-Stand Timing Variability Over Time Using
under Mattress Pressure Sensor Technology”, in IEEE International
Symposium, 2014.
[4] A. Ghosh, S. Roy and C. K. Sarkar, “Design and Simulation of MEMS
Based Piezoresistive Pressure Sensor for Enhanced Sensitivity”, in IEEE
International Conference on Energy Efficient Technology for
Sustaniability, pp. 918-922, 2013.
[5] C. Y. Huan, H. Jaafar, and N. A. Md Yunus. "Design and Analysis of
Capacitive Comb Acceleration Sensor for Automotive Applications." In
The Second International Conference on Technological Advances in
Electrical, Electronics and Computer Engineering (TAEECE2014), pp.
209-214. The Society of Digital Information and Wireless
Communication, 2014.
[6] H. Mori, Y. Matsuda, T. Niimi, H. Uenishi and Y. Sakazaki,
“Development of Pressure Sensitive Molecular Film as a Measurement
Technique for Micro- andNano-devices”, in IEEE International
Symposium on Micro-NanoMechatronics and Huamn Science, 2006.
[7] S. Olyaee and A. Dehghani, “Nano-Pressure Sensor Using High Quality
Photonic Crystal Cavity Resonator”, in IEEE 8th International
Symposium on Communication Systems, Network & Digital Signal
Procesing, 2012.
[8] X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huan,
D. L. Kwan andA. Q. Liu, “A Nano-Opto-Mechanical Pressure Sensor”,
in IEEE International Solid-Sate Sensors, Actuator and Microsystem
Conference, pp. 583-585, 2011.
[9] S. Chaurasia, “Analytical Models for Square Diaphragm Piezoresistive
NEMS Pressure Sensor”, in IEEE Students Conference on Engineering
and Systems, 2013.
[10] SMARTEC, “About Pressure Sensors”, pp. 1-7, The Natherlands.
[11] A. Migreon and A. E. Lenel, “Modern Sensors Handbook”, Chapter 1:
Pressure Sensors, pp. 1-15.
[12] P. K. Rathore and B. S. Panwar, “Design and Optimization of a
CMOS_MEMS Integrated Current Mirror Sensing Based MOSFET
Embedded Pressure Sensor”, in IEEE International Conference on
Control Applications, pp. 442-448, 2013.
[13] V. Mohammadi, S. Torkian, E. Masumi, M. H. Sheikhi, A. Barzegar and
S. Mohammadi, “Design, Modeling and Optimization of a Piezoelectric
Pressure Sensor Based On Thin-Film PZT Diaphragm Contain of
Nanocrystalline Powders”, in IEEE International Symposium on
Mechatronics and its Applications, 2009.
[14] M. Shahiri, B. A. Ganji and R. Sabbaghi, “Design and Simulation of
High Sensitive Capacitive Pressure Sensor with Slotted Diaphragm”, in
IEEE International Conference on Biomedical Engineering, pp. 484-489,
2012.
[15] “How To Measure Pressure with Pressure Sensor”, National
Instruments, (Online). Available: http://www.ni.com/white-paper/3639/
en. (Accessed: 04 Dec 2014).
[16] R. Tiwari and S. Chandra, “Piezoresistive Pressure Sensor Using Low-
Temperature Aluminum Induced Crystallization of Sputter-Deposited
Amorphous Silicon Film”, Journal of Micromechanic and
Microengineering, vol. 23, no. 9, 2013.
[17] “MEMS Pressure Sensor Solution for Automotive Applications”, SMI
Pressure Sensor, pp. 1-8, 2013.
[18] “New Applications for Integrated Pressure Sensors”, Infineon
Technologies AG, rev. 1.1, pp. 1-14, 2011. [19] “MEMS and Nanotechnology Application”, MEMS & Nanotechnology
Exchange, (Online). Available: https://www.mems-exchange.org/MEMS
/applications.html (Accessed: 06 Dec 2014).
[20] A. M. Fitzgerald, “MEMS for Medical Applications”, in IEEE
Engineering in Medicine & Biology Society, pp. 1-38, 2010.
[21] S. Chaurasia, “Design and Simulation of Low Pressure Piezoresistive
NEMS Sensor Using Analytical Models for Biomedical Applications”,
in IEEE Students Conference on Engineering and Systems, 2013.
[1] S. Sathyanaratanan and A. V. Juliet, “Design and Simulation of Touch
Mode MEMS Capacitive Pressure Sensor”, in IEEE International
Conference on Mechanical and Electrical Technology, pp. 180-183,
2010.
[2] J. M. Fernandez, N. Bonet, J. J. Sieiro and J. M. Lopez, “Ceramic
Capacitive Pressure Sensor Based On LTCC Technology”, in IEEE
Spanish Conference, pp. 111-114, 2013.
[3] T. Grant, V. Joshi, M. Taylor, F. Knoefel, H. Sveistrup, M. Bilodeau and
J. Jutai, “Measuring Sit-to-Stand Timing Variability Over Time Using
under Mattress Pressure Sensor Technology”, in IEEE International
Symposium, 2014.
[4] A. Ghosh, S. Roy and C. K. Sarkar, “Design and Simulation of MEMS
Based Piezoresistive Pressure Sensor for Enhanced Sensitivity”, in IEEE
International Conference on Energy Efficient Technology for
Sustaniability, pp. 918-922, 2013.
[5] C. Y. Huan, H. Jaafar, and N. A. Md Yunus. "Design and Analysis of
Capacitive Comb Acceleration Sensor for Automotive Applications." In
The Second International Conference on Technological Advances in
Electrical, Electronics and Computer Engineering (TAEECE2014), pp.
209-214. The Society of Digital Information and Wireless
Communication, 2014.
[6] H. Mori, Y. Matsuda, T. Niimi, H. Uenishi and Y. Sakazaki,
“Development of Pressure Sensitive Molecular Film as a Measurement
Technique for Micro- andNano-devices”, in IEEE International
Symposium on Micro-NanoMechatronics and Huamn Science, 2006.
[7] S. Olyaee and A. Dehghani, “Nano-Pressure Sensor Using High Quality
Photonic Crystal Cavity Resonator”, in IEEE 8th International
Symposium on Communication Systems, Network & Digital Signal
Procesing, 2012.
[8] X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huan,
D. L. Kwan andA. Q. Liu, “A Nano-Opto-Mechanical Pressure Sensor”,
in IEEE International Solid-Sate Sensors, Actuator and Microsystem
Conference, pp. 583-585, 2011.
[9] S. Chaurasia, “Analytical Models for Square Diaphragm Piezoresistive
NEMS Pressure Sensor”, in IEEE Students Conference on Engineering
and Systems, 2013.
[10] SMARTEC, “About Pressure Sensors”, pp. 1-7, The Natherlands.
[11] A. Migreon and A. E. Lenel, “Modern Sensors Handbook”, Chapter 1:
Pressure Sensors, pp. 1-15.
[12] P. K. Rathore and B. S. Panwar, “Design and Optimization of a
CMOS_MEMS Integrated Current Mirror Sensing Based MOSFET
Embedded Pressure Sensor”, in IEEE International Conference on
Control Applications, pp. 442-448, 2013.
[13] V. Mohammadi, S. Torkian, E. Masumi, M. H. Sheikhi, A. Barzegar and
S. Mohammadi, “Design, Modeling and Optimization of a Piezoelectric
Pressure Sensor Based On Thin-Film PZT Diaphragm Contain of
Nanocrystalline Powders”, in IEEE International Symposium on
Mechatronics and its Applications, 2009.
[14] M. Shahiri, B. A. Ganji and R. Sabbaghi, “Design and Simulation of
High Sensitive Capacitive Pressure Sensor with Slotted Diaphragm”, in
IEEE International Conference on Biomedical Engineering, pp. 484-489,
2012.
[15] “How To Measure Pressure with Pressure Sensor”, National
Instruments, (Online). Available: http://www.ni.com/white-paper/3639/
en. (Accessed: 04 Dec 2014).
[16] R. Tiwari and S. Chandra, “Piezoresistive Pressure Sensor Using Low-
Temperature Aluminum Induced Crystallization of Sputter-Deposited
Amorphous Silicon Film”, Journal of Micromechanic and
Microengineering, vol. 23, no. 9, 2013.
[17] “MEMS Pressure Sensor Solution for Automotive Applications”, SMI
Pressure Sensor, pp. 1-8, 2013.
[18] “New Applications for Integrated Pressure Sensors”, Infineon
Technologies AG, rev. 1.1, pp. 1-14, 2011. [19] “MEMS and Nanotechnology Application”, MEMS & Nanotechnology
Exchange, (Online). Available: https://www.mems-exchange.org/MEMS
/applications.html (Accessed: 06 Dec 2014).
[20] A. M. Fitzgerald, “MEMS for Medical Applications”, in IEEE
Engineering in Medicine & Biology Society, pp. 1-38, 2010.
[21] S. Chaurasia, “Design and Simulation of Low Pressure Piezoresistive
NEMS Sensor Using Analytical Models for Biomedical Applications”,
in IEEE Students Conference on Engineering and Systems, 2013.
@article{"International Journal of Electrical, Electronic and Communication Sciences:70595", author = "Nurul Amziah Md Yunus and Izhal Abdul Halin and Nasri Sulaiman and Noor Faezah Ismail and Ong Kai Sheng", title = "Valuation on MEMS Pressure Sensors and Device Applications", abstract = "The MEMS pressure sensor has been introduced and
presented in this paper. The types of pressure sensor and its theory of
operation are also included. The latest MEMS technology, the
fabrication processes of pressure sensor are explored and discussed.
Besides, various device applications of pressure sensor such as tire
pressure-monitoring system, diesel particulate filter and others are
explained. Due to further miniaturization of the device nowadays, the
pressure sensor with nanotechnology (NEMS) is also reviewed. The
NEMS pressure sensor is expected to have better performance as well
as lower in its cost. It has gained an excellent popularity in many
applications.", keywords = "Pressure sensor, diaphragm, MEMS, automotive
application, biomedical application, NEMS.", volume = "9", number = "8", pages = "828-9", }
