Abstract: This paper presents a comparative study on
Vanadyl Phthalocyanine (VOPc) thin films deposited by thermal
evaporation and spin coating techniques. The samples
were prepared on cleaned glass substrates and annealed at
various temperatures ranging form 95oC to 155oC. To obtain
the morphological and structural properties of VOPc thin
films, X-ray diffraction (XRD) technique and atomic force
microscopy (AFM) have been implied. The AFM topographic
images show a very slight difference in the thermally grown
films, before and after annealing, however best results are
achieved for the spin-cast film annealed at 125oC. The XRD
spectra show no existence of the sharp peaks, suggesting the
material to be amorphous. The humps in the XRD patterns
indicate the presence of some crystallites.