Abstract: A diamond-like carbon (DLC) based solid-lubricant
film was designed and DLC films were successfully prepared using a
microwave plasma enhanced magnetron sputtering deposition
technology. Post-test characterizations including Raman
spectrometry, X-ray diffraction, nano-indentation test, adhesion test,
friction coefficient test were performed to study the influence of
substrate bias voltage on the mechanical properties of the W- and
S-doped DLC films. The results indicated that the W- and S-doped
DLC films also had the typical structure of DLC films and a better
mechanical performance achieved by the application of a substrate
bias of -200V.