Abstract: The need for micromechanical inertial sensors is increasing
in future electronic stability control (ESC) and other positioning,
navigation and guidance systems. Due to the rising density of
sensors in automotive and consumer devices the goal is not only to get
high performance, robustness and smaller package sizes, but also to
optimize the energy management of the overall sensor system. This
paper presents an evaluation concept for a surface micromachined
yaw rate sensor. Within this evaluation concept an energy-efficient
operation of the drive mode of the yaw rate sensor is enabled. The
presented system concept can be realized within a power management
subsystem.