Energy-Efficient Sensing Concept for a Micromachined Yaw Rate Sensor
The need for micromechanical inertial sensors is increasing
in future electronic stability control (ESC) and other positioning,
navigation and guidance systems. Due to the rising density of
sensors in automotive and consumer devices the goal is not only to get
high performance, robustness and smaller package sizes, but also to
optimize the energy management of the overall sensor system. This
paper presents an evaluation concept for a surface micromachined
yaw rate sensor. Within this evaluation concept an energy-efficient
operation of the drive mode of the yaw rate sensor is enabled. The
presented system concept can be realized within a power management
subsystem.
[1] A. Lawrence, Modern Inertial Technology, Navigation Guidance and
Control, Springer-Verlag New York, 2002
[2] W.M. Macek and D.T.M. Davis, Rotation rate sensing with traveling wave
ring lasers, Appl. Phys. Lett. 2, Springer-Verlag New York, 1. Feb. 1963,
pp67-68
[3] J. Bernstein, et al., A micromachined comb-drive tuning fork gyroscope,
IEEE Micro Electro Mechanical Systems, IEEE Catalog No. 93CH3265-
6, Feb. 1993, pp143-148
[4] M. Palaniapan, R.T. Howe, J. Yasaitis, Integrated surface-micromachined
z-axis frame microgyroscope, Electron Devices Meeting, 2002. IEDM -02.
Digest. International, Dec. 2002, pp203-206
[5] K. Funk, H. Emmerich, A. Schilp, M. Offenberg, R. Neul, F. L¨armer, A
surface micromachined silicon gyroscope using a thick polysilicon layer.,
Proc., Twelfth IEEE Int. Conf. on Micro Electro Mechanical Systems
(MEMS -99), Jan. 17-21, Orlando, Fla., pp57-60
[6] R. Neul, U. G'omez, K. Kehr, W. Bauer, J. Classen, C. D¨oring, E. Esch,
S. G¨otz, J. Hauer, B. Kuhlmann, C. Lang, M. Veith and R. Willig,
Micromachined Gyros for automotive applications, Sensors 2005 IEEE,
Oct. 2005, pp527-530
[7] R. E. Best, Theorie und Anwendung des Phase-locked Loops, 5rd ed.
AT-Verlag Aarau, 1992
[8] U. Kiencke and H. J¨ackel, Signale und Systeme, 2rd ed. Oldenburg
Verlag M¨unchen, Sep.2002
[1] A. Lawrence, Modern Inertial Technology, Navigation Guidance and
Control, Springer-Verlag New York, 2002
[2] W.M. Macek and D.T.M. Davis, Rotation rate sensing with traveling wave
ring lasers, Appl. Phys. Lett. 2, Springer-Verlag New York, 1. Feb. 1963,
pp67-68
[3] J. Bernstein, et al., A micromachined comb-drive tuning fork gyroscope,
IEEE Micro Electro Mechanical Systems, IEEE Catalog No. 93CH3265-
6, Feb. 1993, pp143-148
[4] M. Palaniapan, R.T. Howe, J. Yasaitis, Integrated surface-micromachined
z-axis frame microgyroscope, Electron Devices Meeting, 2002. IEDM -02.
Digest. International, Dec. 2002, pp203-206
[5] K. Funk, H. Emmerich, A. Schilp, M. Offenberg, R. Neul, F. L¨armer, A
surface micromachined silicon gyroscope using a thick polysilicon layer.,
Proc., Twelfth IEEE Int. Conf. on Micro Electro Mechanical Systems
(MEMS -99), Jan. 17-21, Orlando, Fla., pp57-60
[6] R. Neul, U. G'omez, K. Kehr, W. Bauer, J. Classen, C. D¨oring, E. Esch,
S. G¨otz, J. Hauer, B. Kuhlmann, C. Lang, M. Veith and R. Willig,
Micromachined Gyros for automotive applications, Sensors 2005 IEEE,
Oct. 2005, pp527-530
[7] R. E. Best, Theorie und Anwendung des Phase-locked Loops, 5rd ed.
AT-Verlag Aarau, 1992
[8] U. Kiencke and H. J¨ackel, Signale und Systeme, 2rd ed. Oldenburg
Verlag M¨unchen, Sep.2002
@article{"International Journal of Electrical, Electronic and Communication Sciences:55007", author = "D. Oshinubi and M. Rocznik and K. Dostert", title = "Energy-Efficient Sensing Concept for a Micromachined Yaw Rate Sensor", abstract = "The need for micromechanical inertial sensors is increasing
in future electronic stability control (ESC) and other positioning,
navigation and guidance systems. Due to the rising density of
sensors in automotive and consumer devices the goal is not only to get
high performance, robustness and smaller package sizes, but also to
optimize the energy management of the overall sensor system. This
paper presents an evaluation concept for a surface micromachined
yaw rate sensor. Within this evaluation concept an energy-efficient
operation of the drive mode of the yaw rate sensor is enabled. The
presented system concept can be realized within a power management
subsystem.", keywords = "inertial sensors, micromachined gyros, gyro sensing
concepts, power management, FPGA", volume = "1", number = "6", pages = "830-4", }