Abstract: An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.
Abstract: In hypersonic environments, the aerothermal effect
makes it difficult for the optical side windows of optical guided
missiles to withstand high heat. This produces cracking or breaking,
resulting in an inability to function. This study used computational
fluid mechanics to investigate the external cooling jet conditions of
optical side windows. The turbulent models k-ε and k-ω were
simulated. To be in better accord with actual aerothermal
environments, a thermal radiation model was added to examine
suitable amounts of external coolants and the optical window
problems of aero-thermodynamics. The simulation results indicate that
when there are no external cooling jets, because airflow on the optical
window and the tail groove produce vortices, the temperatures in these
two locations reach a peak of approximately 1600 K. When the
external cooling jets worked at 0.15 kg/s, the surface temperature of
the optical windows dropped to approximately 280 K. When adding
thermal radiation conditions, because heat flux dissipation was faster,
the surface temperature of the optical windows fell from 280 K to
approximately 260 K. The difference in influence of the different
turbulence models k-ε and k-ω on optical window surface temperature
was not significant.