Abstract: An innovative tri-axes micro-power receiver is
proposed. The tri-axes micro-power receiver consists of two sets 3-D
micro-solenoids and one set planar micro-coils in which iron core is
embedded. The three sets of micro-coils are designed to be orthogonal
to each other. Therefore, no matter which direction the flux is present
along, the magnetic energy can be harvested and transformed into
electric power. Not only dead space of receiving power is mostly
reduced, but also transformation efficiency of electromagnetic energy
to electric power can be efficiently raised. By employing commercial
software, Ansoft Maxwell, the preliminary simulation results verify
that the proposed micro-power receiver can efficiently pick up the
energy transmitted by magnetic power source.
As to the fabrication process, the isotropic etching technique is
employed to micro-machine the inverse-trapezoid fillister so that the
copper wire can be successfully electroplated. The adhesion between
micro-coils and fillister is much enhanced.