Abstract: This paper presents the design and fabrication of an
optical window for an optical modulator toward image sensing
applications. An optical window consists of micrometer-order SiO2
capillaries (porous solid) that can modulate transmission light
intensity by moving the liquid in and out of porous solid. A high
optical transmittance of the optical window can be achieved due to
refractive index matching when the liquid is penetrated into the
porous solid. Otherwise, its light transmittance is lower because of
light reflection and scattering by air holes and capillary walls. Silicon
capillaries fabricated by deep reactive ion etching (DRIE) process are
completely oxidized to form the SiO2 capillaries. Therefore, high
aspect ratio SiO2 capillaries can be achieved based on silicon
capillaries formed by DRIE technique. Large compressive stress of
the oxide causes bending of the capillary structure, which is reduced
by optimizing the design of device structure. The large stress of the
optical window can be released via thin supporting beams. A 7.2 mm
x 9.6 mm optical window area toward a fully integrated with the
image sensor format is successfully fabricated and its optical
transmittance is evaluated with and without inserting liquids (ethanol
and matching oil). The achieved modulation range is approximately
20% to 35% with and without liquid penetration in visible region
(wavelength range from 450 nm to 650 nm).
Abstract: In this paper the combination of thermal oxidation and
electrochemical anodizing processes is used to produce titanium
oxide layers. The response of titanium alloy Ti6Al4V to oxidation
processes at various temperatures and electrochemical anodizing in
various voltages are investigated. Scanning electron microscopy
(SEM); X-Ray Diffraction (XRD) and porosity determination have
been used to characterize the oxide layer thickness, surface
morphology, oxide layer-substrate adhesion and porosity. In the first
experiment, samples modified by thermal oxidation process then
followed by electrochemical anodizing. Second experiment consists
of surfaces modified by electrochemical anodizing process and then
followed by thermal oxidation. The first method shows better
properties than other one. In second experiment, Surfaces modified
were achieved by thicker and more adherent thick oxide layers on
titanium surface. The existence of an electrochemical anodized oxide
layer did not improve the adhesion of thermal oxide layer. The high
temperature, thermal formation of an oxide layer leads to a coarse
oxide grain morphology and a complete oxidative particle. In
addition, in high temperature oxidation porosity content is increased.
The oxide layer of thermal oxidation and electrochemical anodizing
processes; on Ti–6Al–4V substrate was covered with different
colored oxide layers.