Abstract: An ultrasound-assisted activation method for
electroless silver plating is presented in this study. When the
ultrasound was applied during the activation step, the amount of the Pd
species adsorbed on substrate surfaces was higher than that of sample
pretreated with a conventional activation process without ultrasound
irradiation. With this activation method, it was also shown that the
adsorbed Pd species with a size of about 5 nm were uniformly
distributed on the surfaces, thus a smooth and uniform coating on the
surfaces was obtained by subsequent electroless silver plating. The
samples after each step were characterized by AFM, XPS, FIB, and
SEM.