Abstract: A new multi inner stage (MIS) cyclone was designed to
remove the acidic gas and fine particles produced from electronic
industry. To characterize gas flow in MIS cyclone, pressure and
velocity distribution were calculated by means of CFD program. Also,
the flow locus of fine particles and particle removal efficiency were
analyzed by Lagrangian method. When outlet pressure condition was
–100mmAq, the efficiency was the best in this study.