Abstract: Since straightness error of linear motor stage is hardly
dependent upon machining accuracy and assembling accuracy, there is
limit on maximum realizable accuracy. To cope with this limitation,
this paper proposed a servo system to compensate straightness error of
a linear motor stage. The servo system is mounted on the slider of the
linear motor stage and moves in the direction of the straightness error
so as to compensate the error. From position dependency and
repeatability of the straightness error of the slider, a feedforward
compensation control is applied to the platform servo control. In the
consideration of required fine positioning accuracy, a platform driven
by an electro-magnetic actuator is suggested and a sliding mode
control was applied. The effectiveness of the sliding mode control was
verified along with some experimental results.