Abstract: Pull-in instability is a nonlinear and crucial effect that is important for the design of microelectromechanical system devices. In this paper, the appropriate electrostatic voltage range is determined by measuring fluid flow pressure via micro pressure sensor based microbeam. The microbeam deflection contains two parts, the static and perturbation deflection of static. The second order equation regarding the equivalent stiffness, mass and damping matrices based on Galerkin method is introduced to predict pull-in instability due to the external voltage. Also the reduced order method is used for solving the second order nonlinear equation of motion. Furthermore, in the present study, the micro capacitive pressure sensor is designed for measuring special fluid flow pressure range. The results show that the measurable pressure range can be optimized, regarding damping field and external voltage.
Abstract: We investigate experimentally and theoretically the
dynamics of a capacitive resonator under mixed frequency excitation
of two AC harmonic signals. The resonator is composed of a proof
mass suspended by two cantilever beams. Experimental
measurements are conducted using a laser Doppler Vibrometer to
reveal the interesting dynamics of the system when subjected to twosource
excitation. A nonlinear single-degree-of-freedom model is
used for the theoretical investigation. The results reveal combination
resonances of additive and subtractive type, which are shown to be
promising to increase the bandwidth of the resonator near primary
resonance frequency. Our results also demonstrate the ability to shift
the combination resonances to much lower or much higher frequency
ranges. We also demonstrate the dynamic pull-in instability under
mixed frequency excitation.