Advanced Micromanufacturing for Ultra Precision Part by Soft Lithography and Nano Powder Injection Molding
Recently, the advanced technologies that offer high
precision product, relative easy, economical process and also rapid
production are needed to realize the high demand of ultra precision
micro part. In our research, micromanufacturing based on soft
lithography and nanopowder injection molding was investigated. The
silicone metal pattern with ultra thick and high aspect ratio succeeds to
fabricate Polydimethylsiloxane (PDMS) micro mold. The process
followed by nanopowder injection molding (PIM) by a simple vacuum
hot press. The 17-4ph nanopowder with diameter of 100 nm, succeed
to be injected and it forms green sample microbearing with thickness,
microchannel and aspect ratio is 700μm, 60μm and 12, respectively.
Sintering process was done in 1200 C for 2 hours and heating rate
0.83oC/min. Since low powder load (45% PL) was applied to achieve
green sample fabrication, ~15% shrinkage happen in the 86% relative
density. Several improvements should be done to produce high
accuracy and full density sintered part.
[1] Suzuki, Kazuaki et al. Microlithography Science and Technology. CRC
Press. Florida: 2007.
[2] Jackson, Mark J. Micro and Nanomanufacturing. Springer Science and
Buisness. United States : 2007
[3] S. Supriadi, E.R. Baek, C.J. Choi, and B.T.Lee, Binder Sstem for STS 316
Nanopowder Feedstocks in Micro-Metal Injection Molding, 2007,Journal
of Materials Processing Technology, Vol:187-188,p270-273
[4] Donggang Yao and Byung. Simulation of the filling process in micro
channels for polymeric materials. J. Micromech. Microeng. 12 (2002)
604-610
[5] H. Mekaru, T. yamada, S. Yan, T. Hattori. "Microfabrication by hot
embossing and injection molding at LASTI". MicrosystemTechnologies
10 (2004) 672-688, Springer-Verlag 2004.
[1] Suzuki, Kazuaki et al. Microlithography Science and Technology. CRC
Press. Florida: 2007.
[2] Jackson, Mark J. Micro and Nanomanufacturing. Springer Science and
Buisness. United States : 2007
[3] S. Supriadi, E.R. Baek, C.J. Choi, and B.T.Lee, Binder Sstem for STS 316
Nanopowder Feedstocks in Micro-Metal Injection Molding, 2007,Journal
of Materials Processing Technology, Vol:187-188,p270-273
[4] Donggang Yao and Byung. Simulation of the filling process in micro
channels for polymeric materials. J. Micromech. Microeng. 12 (2002)
604-610
[5] H. Mekaru, T. yamada, S. Yan, T. Hattori. "Microfabrication by hot
embossing and injection molding at LASTI". MicrosystemTechnologies
10 (2004) 672-688, Springer-Verlag 2004.
@article{"International Journal of Mechanical, Industrial and Aerospace Sciences:49498", author = "Andy Tirta and Yus Prasetyo and Eung-Ryul. Baek and Chul-Jin. Choi and Hye-Moon. Lee", title = "Advanced Micromanufacturing for Ultra Precision Part by Soft Lithography and Nano Powder Injection Molding", abstract = "Recently, the advanced technologies that offer high
precision product, relative easy, economical process and also rapid
production are needed to realize the high demand of ultra precision
micro part. In our research, micromanufacturing based on soft
lithography and nanopowder injection molding was investigated. The
silicone metal pattern with ultra thick and high aspect ratio succeeds to
fabricate Polydimethylsiloxane (PDMS) micro mold. The process
followed by nanopowder injection molding (PIM) by a simple vacuum
hot press. The 17-4ph nanopowder with diameter of 100 nm, succeed
to be injected and it forms green sample microbearing with thickness,
microchannel and aspect ratio is 700μm, 60μm and 12, respectively.
Sintering process was done in 1200 C for 2 hours and heating rate
0.83oC/min. Since low powder load (45% PL) was applied to achieve
green sample fabrication, ~15% shrinkage happen in the 86% relative
density. Several improvements should be done to produce high
accuracy and full density sintered part.", keywords = "Micromanufacturing, Nano PIM, PDMS micro
mould.", volume = "3", number = "5", pages = "455-4", }