The Impact of Process Parameters on the Output Characteristics of an LDMOS Device

In this paper, we have examined the effect of process parameter variation on the electrical characteristics of an LDMOS device. The rate of change in the electrical parameters such as cut off frequency, breakdown voltage and drain saturation current as a function of the process parameters is investigated

Authors:

• M. A. Malakoutian
• V. Fathipour
• M. Fathipour
• A. Mojab
• M. M. Allame
• M. Moradinasab

Keywords:

• LDMOS
• Process Parameters
• characteristics
• parameter variation.

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