Stealth Laser Dicing Process Improvement via Shuffled Frog Leaping Algorithm

In this paper, performances of shuffled frog leaping
algorithm was investigated on the stealth laser dicing process. Effect
of problem on the performance of the algorithm was based on the
tolerance of meandering data. From the customer specification it
could be less than five microns with the target of zero microns.
Currently, the meandering levels are unsatisfactory when compared
to the customer specification. Firstly, the two-level factorial design
was applied to preliminarily study the statistically significant effects
of five process variables. In this study one influential process variable
is integer. From the experimental results, the new operating condition
from the algorithm was superior when compared to the current
manufacturing condition.

• Pongchanun Luangpaiboon
• Wanwisa Sarasang

• Stealth Laser Dicing Process
• Meandering
• Metaheuristics
• Shuffled Frog Leaping Algorithm.

[1] W. Sarasan and P. Luangpaiboon, “Meandering Improvement of Stealth
Laser Dicing Process via Mixed Integer Linear Constrained Response
Surface Optimisation Model”, Proceedings of the National Operations
Research Co-operative Research Network Conference, Bangkok,
Thailand, 2011.
[2] M. Kumagai, N. Uchiyama, E.Ohmura, R. Sugiura, K. Atsumi and K.
Fukumitsu, “Advance Dicing Technology for Semiconductor Wafer-
Stealth Dicing”, IEEE Transaction on Semiconductor Manufacturing,
vol. 20, no. 3, 2007.
[3] M.M. Eusuff, K.E. Lansey, “Optimisation of Water Distribution
Network Design using the Shuffled Frog Leaping Algorithm”, Journal of Water Resources Planning and Management-Asce, vol. 129, no. 3, pp.
210-225, 2003.
[4] P. Aungkulanon and P.Luangpaiboon, “Hybridisations of Variable
Neighbourhood Search and Modified Simplex Elements to Harmony
Search and Shuffled Frog Leaping Algorithms for Process
Optimisations”, AIP Conference Proceedings, 1285, pp. 44-58, 2010.
[5] P. Luangpaiboon, Y. Suwankham and S. Homrossukon, “Constrained
Response Surface Optimisation for Precisely Atomising Spraying
Process”, IAENG Transactions on Engineering Technologies, vol. 5, pp.
286-300, 2010. DOI: 10.1063/1.3510555