Influence of UV Treatment on the Electrooptical Properties of Indium Tin Oxide Films Used in Flexible Displays
Indium-tin oxide films are deposited by low plasma
temperature RF sputtering on highly flexible modification of glycol
polyethyleneterephtalate substrates. The produced layers are
characterized with transparency over 82 % and sheet resistance of
86.9 Ω/square. The film’s conductivity was further improved by
additional UV illumination from light source (365 nm), having power
of 250 W. The influence of the UV exposure dose on the structural
and electro-optical properties of ITO was investigated. It was
established that the optimum time of illumination is 10 minutes and
further UV treatment leads to polymer substrates degradation.
Structural and bonds type analysis show that at longer treatment
carbon atoms release and diffuse into ITO films, which worsen their
electrical behavior. For the optimum UV dose the minimum sheet
resistance was measured to be 19.2 Ω/square, and the maximum
transparency remained almost unchanged – above 82 %.
[1] S. Lin, S. Hwang, and R. J. Koubek, "Minimum ambient illumination requirement for legible electronic-paper display", Displays, vol. 32, pp.
8-16, 2011.
[2] F. C. Krebs, "Fabrication and processing of polymer solar cells: A review of printing and coating techniques", Sol. Energ. Mat. Sol. Cells,
vol. 93, pp. 394-412, 2009.
[3] A. Abdellah, B. Fabel, P. Lugli, and G. Scarpa, "Spray deposition of
organic semiconducting thin-films: Towards the fabrication of arbitrary shaped organic electronic devices", Org. Electr., vol. 11, pp. 1031-1038,2010.
[4] P. Chang, C. Wu, and H. Leu, "Investigation of technological trends in
flexible display fabrication through patent analysis", Displays, vol. 33,
pp. 68-73, 2012.
[5] W. Kuo, P. Lin, and Sh. Hwang, "A framework of perceptual quality
assessment on LCD-TV", Displays, vol.8, pp. 35-43, 2007.
[6] B. Ren, X. Liu, M. Wang, and Y. Xu, "Preparation and characteristics of
indium tin oxide (ITO) thin films at low temperature by r.f. magnetron
sputtering", Rare Metals, vol. 25, pp. 137-140, 2006.
[7] Ch. S. Moon, and J. G. Han, "Low temperature synthesis of ITO thin
film on polymer in Ar/H2 plasma by pulsed DC magnetron sputtering",
Thin Solid Films, vol. 516, pp. 6560-6564, 2008.
[8] T.P. Muneshwar, V. Varma, N. Meshram, S. Soni, and R.O. Dusane,
"Development of low temperature RF magnetron sputtered ITO films on
flexible substrate", Solar Energy Materials and Solar Cells, vol. 94, pp.
1448-1450, 2010.
[9] Zh. Yang, Sh. Han, T. Yang, L. Ye, H. Ma, and Ch. Cheng, "ITO films
deposited on water-cooled flexible substrate by bias RF Magnetron
Sputtering", Applied Surface Science, vol. 161, pp. 279-285, 2000.
[10] M. P. Aleksandrova, G. H. Dobrikov, and M. M. Rassovska,
"Impedance Investigation of Polymer Layers for Electroluminescent
Devices", International Journal of Polymeric Materials, vol. 61, pp. 1-7,
2012.
[11] Tz. Babeva, S. Kitova, and I. Konstantinov, "Photometric methods of
determination of the optical constants and the thickness of thin
absorbing films: Criteria for precise and unambiguous determination of
n, k and d in a wide spectral range", Appl. Opt., vol. 40, pp. 2682-2686,
2001.
[12] S. Tabakov, V. Yakimov, and V. Videkov "Modernization of
Spectrophotometric Measurements", 19-th ISS on Semiconductor and
Hybrid Technologies - Sofia, Bulgaria, vol.19, pp. 24-27, 1998.
[13] M. Aleksandrova, N. Nikolov, and I. Pandiev, "Thermo-stimulation of
charges by Peltier element for trap analysis in polymer layers",
International Journal of Polymer Anal. Charact., vol. 16, pp. 221-227, 2011.
[14] A.K. Kulkarnia, K. H. Schulz, T.S. Lim, and M. Khan. "Dependence of
the sheet resistance of indium-tin-oxide thin films on grain size and
grain orientation determined from X-ray diffraction techniques", Thin
Solid Films, vol. 345, pp. 273-277, 1999.
[15] M.K.M. Ali, K. Ibrahim, O. S Hamad, M.H. Eisa, M.G. Faraj, and F.
Azhari, "Deposited indium tin oxide (ITO) thin films by DC-magnetron
sputtering on polyethylene terephthalate substrate (PET), Rom. Journ.
Phys., vol. 56, pp. 730-741, 2011.
[1] S. Lin, S. Hwang, and R. J. Koubek, "Minimum ambient illumination requirement for legible electronic-paper display", Displays, vol. 32, pp.
8-16, 2011.
[2] F. C. Krebs, "Fabrication and processing of polymer solar cells: A review of printing and coating techniques", Sol. Energ. Mat. Sol. Cells,
vol. 93, pp. 394-412, 2009.
[3] A. Abdellah, B. Fabel, P. Lugli, and G. Scarpa, "Spray deposition of
organic semiconducting thin-films: Towards the fabrication of arbitrary shaped organic electronic devices", Org. Electr., vol. 11, pp. 1031-1038,2010.
[4] P. Chang, C. Wu, and H. Leu, "Investigation of technological trends in
flexible display fabrication through patent analysis", Displays, vol. 33,
pp. 68-73, 2012.
[5] W. Kuo, P. Lin, and Sh. Hwang, "A framework of perceptual quality
assessment on LCD-TV", Displays, vol.8, pp. 35-43, 2007.
[6] B. Ren, X. Liu, M. Wang, and Y. Xu, "Preparation and characteristics of
indium tin oxide (ITO) thin films at low temperature by r.f. magnetron
sputtering", Rare Metals, vol. 25, pp. 137-140, 2006.
[7] Ch. S. Moon, and J. G. Han, "Low temperature synthesis of ITO thin
film on polymer in Ar/H2 plasma by pulsed DC magnetron sputtering",
Thin Solid Films, vol. 516, pp. 6560-6564, 2008.
[8] T.P. Muneshwar, V. Varma, N. Meshram, S. Soni, and R.O. Dusane,
"Development of low temperature RF magnetron sputtered ITO films on
flexible substrate", Solar Energy Materials and Solar Cells, vol. 94, pp.
1448-1450, 2010.
[9] Zh. Yang, Sh. Han, T. Yang, L. Ye, H. Ma, and Ch. Cheng, "ITO films
deposited on water-cooled flexible substrate by bias RF Magnetron
Sputtering", Applied Surface Science, vol. 161, pp. 279-285, 2000.
[10] M. P. Aleksandrova, G. H. Dobrikov, and M. M. Rassovska,
"Impedance Investigation of Polymer Layers for Electroluminescent
Devices", International Journal of Polymeric Materials, vol. 61, pp. 1-7,
2012.
[11] Tz. Babeva, S. Kitova, and I. Konstantinov, "Photometric methods of
determination of the optical constants and the thickness of thin
absorbing films: Criteria for precise and unambiguous determination of
n, k and d in a wide spectral range", Appl. Opt., vol. 40, pp. 2682-2686,
2001.
[12] S. Tabakov, V. Yakimov, and V. Videkov "Modernization of
Spectrophotometric Measurements", 19-th ISS on Semiconductor and
Hybrid Technologies - Sofia, Bulgaria, vol.19, pp. 24-27, 1998.
[13] M. Aleksandrova, N. Nikolov, and I. Pandiev, "Thermo-stimulation of
charges by Peltier element for trap analysis in polymer layers",
International Journal of Polymer Anal. Charact., vol. 16, pp. 221-227, 2011.
[14] A.K. Kulkarnia, K. H. Schulz, T.S. Lim, and M. Khan. "Dependence of
the sheet resistance of indium-tin-oxide thin films on grain size and
grain orientation determined from X-ray diffraction techniques", Thin
Solid Films, vol. 345, pp. 273-277, 1999.
[15] M.K.M. Ali, K. Ibrahim, O. S Hamad, M.H. Eisa, M.G. Faraj, and F.
Azhari, "Deposited indium tin oxide (ITO) thin films by DC-magnetron
sputtering on polyethylene terephthalate substrate (PET), Rom. Journ.
Phys., vol. 56, pp. 730-741, 2011.
@article{"International Journal of Chemical, Materials and Biomolecular Sciences:62301", author = "Mariya P. Aleksandrova and Ivelina N. Cholakova and Georgy K. Bodurov and Georgy D. Kolev and Georgy H.
Dobrikov", title = "Influence of UV Treatment on the Electrooptical Properties of Indium Tin Oxide Films Used in Flexible Displays", abstract = "Indium-tin oxide films are deposited by low plasma
temperature RF sputtering on highly flexible modification of glycol
polyethyleneterephtalate substrates. The produced layers are
characterized with transparency over 82 % and sheet resistance of
86.9 Ω/square. The film’s conductivity was further improved by
additional UV illumination from light source (365 nm), having power
of 250 W. The influence of the UV exposure dose on the structural
and electro-optical properties of ITO was investigated. It was
established that the optimum time of illumination is 10 minutes and
further UV treatment leads to polymer substrates degradation.
Structural and bonds type analysis show that at longer treatment
carbon atoms release and diffuse into ITO films, which worsen their
electrical behavior. For the optimum UV dose the minimum sheet
resistance was measured to be 19.2 Ω/square, and the maximum
transparency remained almost unchanged – above 82 %.", keywords = "Flexible displays, indium tin oxide, RF sputtering, UV treatment", volume = "6", number = "11", pages = "1080-4", }
