Thermodynamic Equilibrium of Nitrogen Species Discharge: Comparison with Global Model
The equilibrium process of plasma nitrogen species by
chemical kinetic reactions along various pressures is successfully
investigated. The equilibrium process is required in industrial
application to obtain the stable condition when heating up the
material for having homogenous reaction. Nitrogen species densities
is modeled by a continuity equation and extended Arrhenius form.
These equations are used to integrate the change of density over the
time. The integration is to acquire density and the reaction rate of
each reaction where temperature and time dependence are imposed.
A comparison is made with global model within pressure range of 1-
100mTorr and the temperature of electron is set to be higher than
other nitrogen species. The results shows that the chemical kinetic
model only agrees for high pressure because of no power imposed;
while the global model considers the external power along the
pressure range then the electron and nitrogen species give highly
quantity densities by factor of 3 to 5.
[1] S. E. Babayan, G. Ding and R. F. Hicks, "Determination of the nitrogen
atom density in the afterglow of a nitrogen and helium, nonequilibrium,
atmospheric pressure plasma," Plasma Chemistry and Plasma
Processing, 21(4)(2001) 505-521
[2] J. Park, I. Henins, H. W. Herrmann, and G. S. Selwyn, "An atmospheric
pressure plasma source," Appl. Phys. Lett., 76(3)(2000) 288-290
[3] L. Yu, Laurent Pierrot, Christophe O. Laux, Charles H. Kruger, "Effects
of vibrational nonequilibrium on the chemistry of two-temperature
nitrogen plasmas, Plasma Chemistry and Plasma Processing,
21(4)(2001) 483-503
[4] Toshiki Nakano, "Some recent topics of non-equilibrium discharge
plasma technologies, IEEE Trans. on Dielectrics and Electrical
Insulation, 14(5)(2007)1081-1087
[5] K.H Becker, U. Kogelschatz, K.H Schoenbach, R.J Barker, "Nonequilibrium
air plasmas at atmospheric pressure, IoP Publishing, 2004,
page 125-126.
[6] E. G. Thorsteinsson and J. T. Gudmundsson, A global (volume
averaged) model of the nitrogen discharge: I. Steady State, Plasma
Sources Science and Technology, 18 (4) (2009) 045001
[7] J Hugill, T Saktioto, A simplified chemical kinetic model for slightly
ionized, atmospheric pressure nitrogen plasmas, Plasma Sources Science
and Technology, 10 (38) (2001) 38-42
[8] Saktioto, A thermodynamic equilibrium of nitrogen plasma species at
atmospheric pressure: An application for afterglow, Kontribusi Fisika
Indonesia, 13(2)(2002) 104-107
[9] IUPAC Compendium of Chemical Terminology, 2nd Edition (1997).
[10] E.G Thorsteinsson, The Nitrogen Discharge. A Global (volume
averaged) Model Study, Electrical and Computer Engineering,
University of Iceland, October 2008.
[11] N St J Braithwaite, "Introduction to gas discharges", Plasma Sources
Sci. Technol. 9 (2000) 517-527
[12] C. H. Kruger, Christophe O. Laux, Lan Yu, Denis M. Packan, Laurent
Pierrot "Nonequilibrium discharges in air and nitrogen plasmas at
atmospheric pressure," Pure Applied Chemical., 74(3)(2002)337-347.
[1] S. E. Babayan, G. Ding and R. F. Hicks, "Determination of the nitrogen
atom density in the afterglow of a nitrogen and helium, nonequilibrium,
atmospheric pressure plasma," Plasma Chemistry and Plasma
Processing, 21(4)(2001) 505-521
[2] J. Park, I. Henins, H. W. Herrmann, and G. S. Selwyn, "An atmospheric
pressure plasma source," Appl. Phys. Lett., 76(3)(2000) 288-290
[3] L. Yu, Laurent Pierrot, Christophe O. Laux, Charles H. Kruger, "Effects
of vibrational nonequilibrium on the chemistry of two-temperature
nitrogen plasmas, Plasma Chemistry and Plasma Processing,
21(4)(2001) 483-503
[4] Toshiki Nakano, "Some recent topics of non-equilibrium discharge
plasma technologies, IEEE Trans. on Dielectrics and Electrical
Insulation, 14(5)(2007)1081-1087
[5] K.H Becker, U. Kogelschatz, K.H Schoenbach, R.J Barker, "Nonequilibrium
air plasmas at atmospheric pressure, IoP Publishing, 2004,
page 125-126.
[6] E. G. Thorsteinsson and J. T. Gudmundsson, A global (volume
averaged) model of the nitrogen discharge: I. Steady State, Plasma
Sources Science and Technology, 18 (4) (2009) 045001
[7] J Hugill, T Saktioto, A simplified chemical kinetic model for slightly
ionized, atmospheric pressure nitrogen plasmas, Plasma Sources Science
and Technology, 10 (38) (2001) 38-42
[8] Saktioto, A thermodynamic equilibrium of nitrogen plasma species at
atmospheric pressure: An application for afterglow, Kontribusi Fisika
Indonesia, 13(2)(2002) 104-107
[9] IUPAC Compendium of Chemical Terminology, 2nd Edition (1997).
[10] E.G Thorsteinsson, The Nitrogen Discharge. A Global (volume
averaged) Model Study, Electrical and Computer Engineering,
University of Iceland, October 2008.
[11] N St J Braithwaite, "Introduction to gas discharges", Plasma Sources
Sci. Technol. 9 (2000) 517-527
[12] C. H. Kruger, Christophe O. Laux, Lan Yu, Denis M. Packan, Laurent
Pierrot "Nonequilibrium discharges in air and nitrogen plasmas at
atmospheric pressure," Pure Applied Chemical., 74(3)(2002)337-347.
@article{"International Journal of Chemical, Materials and Biomolecular Sciences:64752", author = "Saktioto and F.D Ismail and P.P. Yupapin and J. Ali", title = "Thermodynamic Equilibrium of Nitrogen Species Discharge: Comparison with Global Model", abstract = "The equilibrium process of plasma nitrogen species by
chemical kinetic reactions along various pressures is successfully
investigated. The equilibrium process is required in industrial
application to obtain the stable condition when heating up the
material for having homogenous reaction. Nitrogen species densities
is modeled by a continuity equation and extended Arrhenius form.
These equations are used to integrate the change of density over the
time. The integration is to acquire density and the reaction rate of
each reaction where temperature and time dependence are imposed.
A comparison is made with global model within pressure range of 1-
100mTorr and the temperature of electron is set to be higher than
other nitrogen species. The results shows that the chemical kinetic
model only agrees for high pressure because of no power imposed;
while the global model considers the external power along the
pressure range then the electron and nitrogen species give highly
quantity densities by factor of 3 to 5.", keywords = "chemical kinetic model, Arrhenius equation,nitrogen plasma, low pressure discharge", volume = "3", number = "12", pages = "655-5", }