The Analysis of Radial/Axial Error Motion on a Precision Rotation Stage

Rotating stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor state of manufactured goods. To evaluate and improve the performance of such precision rotary stage, unessential movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of a rotating stage with high precision capacitive sensors. To obtain the radial error motion from T.I.R (Total Indicated Reading) of radial direction, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have defined and measured the sensitivity of positioning error to the five error motions.

Authors:

• Jinho Kim
• Dongik Shin
• Deokwon Yun
• Changsoo Han

Keywords:

• Donaldson's reversal methods
• Estler face motionreversal method
• Error motion
• sensitivity
• T.I.R (Total IndicatedReading).

References:

[1] Donaldson, R.R., "A Simple Method for Separating Spindle Error from
Test Ball Roundness Error.", CIRP-Annals., Vol. 21, No. 1, pp.125~126.,
1972.
[2] Evans, C. J., Hocken, R. J., Estler, W. T, Self- calibration: reversal,
redundancy, error separation, and absolute testing. CIRP Annals, Vol.
45, No. 2, pp. 483-492, 1996.
[3] Spragg, R., and Whitehouse, D., procedures of the Institute of Mechanical
Engineers, 182, 1968.
[4] Grejda, R.D., "Use and Calibration of Ultraprecision Axes of Rotation
With Nanometer Level Metrology", in Mechanical Engineering. 2002,
The Pennsylvania State University, p.135.
[5] Whitehouse DJ. "Some Theoretical Aspects of Error Separation
Techniques in Surface Metrology", J. of Phys. E:Sci.Inst., Vol. 9, pp.
531-536, 1976.
[6] Marsh E., Couey J., and Vallance R., "Nanometer Lever Comparison of
Three Spindle Error Motion Separation Techniques."
[7] James G.Salsbury., "Implementation of the Estler face motion reversal
technique.", Precision Engineering., Vol.27, pp.189-194, 2003.
[8] ANSI B89.3.4, "Axes of Rotation: Methods for Specifying and Testing
Standard", ANSI/ASME, 2004.