Research of Ring MEMS Rate Integrating Gyroscopes

This paper To get the angle value with a MEMS rate gyroscope in some specific field, the usual method is to make an integral operation to the rate output, which will lead the error cumulating effect. So the rate gyro is not suitable. MEMS rate integrating gyroscope (MRIG) will solve this problem. A DSP system has been developed to implement the control arithmetic. The system can measure the angle of rotation directly by the control loops that make the sensor work in whole-angle mode. Modeling the system with MATLAB, desirable results of angle outputs are got, which prove the feasibility of the control arithmetic.

Authors:

• Hui Liu
• Haiyang Quan

Keywords:

• Rate gyroscope
• Rate integrating gyroscope
• Whole angle mode
• MATLAB modeling
• DSP control.

References:

[1] A. M. Shelk, "Type I and type II Micromachined Vibratory Gyroscopes".
[2] Michael William Putty, "A Micro Machined Vibrating Ring Gyroscope".
[3] E. J. Loper and D. Lynch, "Vibratory Rotation Sensor", Aug. 28, 1990,
U.S. Patent 4,951,508.
[4] I. P. Prikhodko, S. A. Zotov, A. A. Trusov, A. M. Shkel, "Foucault
pendulum on a chip: Rate integrating silicon MEMS gyroscope", Sensors
and Actuators A 177 (2012) 67- 78.
[5] J. Cho, J. A. Gregory and K. Najafi, "Single-Crystal-Silicon Vibratory
Cylinderical Rate Integrating Gyroscope (CING)", Transducers- 11,
Beijing, China, June 5-9, 2011.
[6] B. J. Gallacher, "Principles of a Micro-Rate Integrating Ring Gyroscope",
IEEE Transaction on aerospace and electronic systems VOL. 48, NO. 1
January 2012.
[7] D.D. Lynch, "Vibratory gyroscope analysis by the method of averaging",
2nd St. Petersburg Int. Conf. on Gyroscopic Technology and Navigation,
St. Petersburg, Russia, 1995.
[8] Z. X. Hu, B. J. Gallacher, J. S. Burdess, C. P. Fell, K. Townsend, "A
Parametrically amplified MEMS rate gyroscope", Sensors and Actuators
A 167 (2011) 249-260.
[9] C. Painter and A. Shkel, "Experimental evaluation of a control system for
an absolute angle measuring micromachined gyroscope", 4th IEEE
Conference on Sensors, Oct. 31-Nov. 03, 2005.
[10] J. A. Gregory, J. Cho, K. Najafi, "MEMS rate and rate-integrating
gyroscope control with commercial software defined radio hardware",
IEEE Transducers 2011, Beijing, China, 2011.