New Iterative Algorithm for Improving Depth Resolution in Ionic Analysis: Effect of Iterations Number

In this paper, the improvement by deconvolution of
the depth resolution in Secondary Ion Mass Spectrometry (SIMS)
analysis is considered. Indeed, we have developed a new Tikhonov-
Miller deconvolution algorithm where a priori model of the solution
is included. This is a denoisy and pre-deconvoluted signal obtained
from: firstly, by the application of wavelet shrinkage algorithm,
secondly by the introduction of the obtained denoisy signal in an
iterative deconvolution algorithm. In particular, we have focused the
light on the effect of the iterations number on the evolution of the
deconvoluted signals. The SIMS profiles are multilayers of Boron in
Silicon matrix.

• N. Dahraoui
• M. Boulakroune
• D. Benatia

• DRF
• in-depth resolution
• multiresolution deconvolution
• SIMS
• wavelet shrinkage.

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