Nanoindentation of Thin Films Prepared by Physical Vapor Deposition
These Monolayer and multilayer coatings of CrN and
AlCrN deposited on 100Cr6 (AISI 52100) substrate by PVD
magnetron sputtering system. The microstructures of the coatings
were characterized using atomic force microscopy (AFM). The AFM
analysis revealed the presence of domes and craters that are
uniformly distributed over all surfaces of the various layers.
Nanoindentation measurement of CrN coating showed maximum
hardness (H) and modulus (E) of 14 GPa and 190 GPa, respectively.
The measured H and E values of AlCrN coatings were found to be 30
GPa and 382 GPa, respectively. The improved hardness in both the
coatings was attributed mainly to a reduction in crystallite size and
decrease in surface roughness. The incorporation of Al into the CrN
coatings has improved both hardness and Young’s modulus.
[1] K. Holmberg, A. Matthews, “Tribology: Properties, mechanisms,
techniques and applications in surface engineering,” in Coating tribology
vol. 56, 2009.
[2] M. Van Stappen, K. M. Stales, M. Kerkhofs, C. Quaeyhaegens “State of
the art for the industrial use of ceramic PVD coatings,” in Surf. Coat.
Technol vol. 629, 2013, pp. 85-96.
[3] K. Khlifi, A. Ben Cheikh Larbi “Mechanical properties and adhesion of
TiN monolayer and TiN/TiAlN nanolayer coatings,” in Journal of
Adhesion Science and Technologyl, 1995, pp. 74-75.
[4] B. Navinsek, P. Panjan, I. Milosev “Industrial applications of CrN
(PVD) coatings, deposited at high and low temperatures,” in Surf. Coat.
Technol, 1997, pp 182.
[5] H. A. Jehn, “Multicomponent and multiphase hard coatings for
tribological applications,” in Surf. Coat. Technol, 2000, pp 433-440.
[6] H. Hasegawa, T. Suzuki “Effects of second metal contents on
microstructure method” Surf. Coat. Technol, 2004, pp 188-189.
[7] M. Kawate, A. K. Hashimoto, T. Suzuki “Oxidation resistance of CrAlN
and TiAlN films,” in Surf. Coat. Technol, 2003, pp 163-167.
[8] A. C. Fischer-Cripps, “Critical review of analysis and interpretation of
nanoindentation test,” in Surf. Coat. Technol, 2006, pp 4153.
[9] Lv F, Wen SP, Zong RL, Zeng F, Gao Y, Pan F. “Nanoindentation study
of amorphous-Co79Zr13Nb8/Cr multilayers,” in Surf. Coat. Technol.
2008, 202, pp3239–3245.
[10] Harish C. Barshilia , N. Selvakumar, B. Deepthi, K.S. Rajam, “A
comparative study of reactive direct current magnetron sputtered CrAlN
and CrN coatings,” in Surface & Coatings Technology ., 2006, 201,
pp2193–2201.
[1] K. Holmberg, A. Matthews, “Tribology: Properties, mechanisms,
techniques and applications in surface engineering,” in Coating tribology
vol. 56, 2009.
[2] M. Van Stappen, K. M. Stales, M. Kerkhofs, C. Quaeyhaegens “State of
the art for the industrial use of ceramic PVD coatings,” in Surf. Coat.
Technol vol. 629, 2013, pp. 85-96.
[3] K. Khlifi, A. Ben Cheikh Larbi “Mechanical properties and adhesion of
TiN monolayer and TiN/TiAlN nanolayer coatings,” in Journal of
Adhesion Science and Technologyl, 1995, pp. 74-75.
[4] B. Navinsek, P. Panjan, I. Milosev “Industrial applications of CrN
(PVD) coatings, deposited at high and low temperatures,” in Surf. Coat.
Technol, 1997, pp 182.
[5] H. A. Jehn, “Multicomponent and multiphase hard coatings for
tribological applications,” in Surf. Coat. Technol, 2000, pp 433-440.
[6] H. Hasegawa, T. Suzuki “Effects of second metal contents on
microstructure method” Surf. Coat. Technol, 2004, pp 188-189.
[7] M. Kawate, A. K. Hashimoto, T. Suzuki “Oxidation resistance of CrAlN
and TiAlN films,” in Surf. Coat. Technol, 2003, pp 163-167.
[8] A. C. Fischer-Cripps, “Critical review of analysis and interpretation of
nanoindentation test,” in Surf. Coat. Technol, 2006, pp 4153.
[9] Lv F, Wen SP, Zong RL, Zeng F, Gao Y, Pan F. “Nanoindentation study
of amorphous-Co79Zr13Nb8/Cr multilayers,” in Surf. Coat. Technol.
2008, 202, pp3239–3245.
[10] Harish C. Barshilia , N. Selvakumar, B. Deepthi, K.S. Rajam, “A
comparative study of reactive direct current magnetron sputtered CrAlN
and CrN coatings,” in Surface & Coatings Technology ., 2006, 201,
pp2193–2201.
@article{"International Journal of Chemical, Materials and Biomolecular Sciences:70561", author = "Dhiflaoui Hafedh and Khlifi Kaouthar and Ben Cheikh Larbi Ahmed", title = "Nanoindentation of Thin Films Prepared by Physical Vapor Deposition", abstract = "These Monolayer and multilayer coatings of CrN and
AlCrN deposited on 100Cr6 (AISI 52100) substrate by PVD
magnetron sputtering system. The microstructures of the coatings
were characterized using atomic force microscopy (AFM). The AFM
analysis revealed the presence of domes and craters that are
uniformly distributed over all surfaces of the various layers.
Nanoindentation measurement of CrN coating showed maximum
hardness (H) and modulus (E) of 14 GPa and 190 GPa, respectively.
The measured H and E values of AlCrN coatings were found to be 30
GPa and 382 GPa, respectively. The improved hardness in both the
coatings was attributed mainly to a reduction in crystallite size and
decrease in surface roughness. The incorporation of Al into the CrN
coatings has improved both hardness and Young’s modulus.", keywords = "CrN/AlCrN, coatings, hardness, nano-indentation.", volume = "9", number = "2", pages = "368-4", }