Resonant-Based Capacitive Pressure Sensor Read-Out Oscillating at 1.67 GHz in 0.18
This paper presents a resonant-based read-out circuit for capacitive pressure sensors. The proposed read-out circuit consists of an LC oscillator and a counter. The circuit detects the capacitance changes of a capacitive pressure sensor by means of frequency shifts from its nominal operation frequency. The proposed circuit is designed in 0.18 m CMOS with an estimated power consumption of 43.1mW. Simulation results show that the circuit has a capacitive resolution of 8.06kHz/fF, which enables it for high resolution pressure detection.
<p>[1] R. Puers, “Capacitive sensors: When and how to use them,” Sens.
Actuators A, Phys., vol. 37/38, pp. 93–105, Jun.–Aug. 1993.
[2] O. Brand, “Microsensor integration into systems-on-chip,” Proc. IEEE,
vol. 94, no. 6, pp. 1160–1176, Jun. 2006.
[3] Dong-Yong Shin, Hyunjoong Lee, and Suhwan Kim, “A delta–Sigma
interface circuit for capacitive sensors with an automatically calibrated
zero point,” IEEE Transactions on Circuits and Systems II: Express
Briefs, vol. 58, pp. 90–94 , Feb. 2011.
[4] Dong-Yong Shin, Hyunjoong Lee, and Suhwan Kim, “Improving the
accuracy of capacitance-to-frequency converter by accumulating
residual charges,” IEEE Transactions on Instrumentation and
Measurement, vol. 60, pp. 3950–3955, Dec. 2011.
[5] Zhichao Tan, et.al, “A 1.8V 11μW CMOS smart humidity sensor for
RFID sensing applications,” Proc. IEEE Asian Solid State Circuits
Conference, pp. 105–108, Nov. 2011.
[6] J. A. Geen, S. J. Sherman, J. F. Chang, S. R. Lewis, “Single chip surface
micromachined integrated gyroscope with 50°/h Allan deviation,” IEEE
J. of Solid-State Circuits, vol. 37, Dec. 2002, pp.1860–1866.
[7] S.J. Sherman, et.al., “Low cost monolithic accelerometer”, Dig. VLSI
Circuits Symp., June 1992, pp. 34–35.
[8] K. Chau, S.R. Lewis, Y, Zhao, R. T. Howe, S.F. Bart, and R.G.
Marcheselli, ”An integrated force-balanced capacitive accelerometer for
low-g applications,” 1995 IEEE Conf. on Solid-State Sensors &
Actuators, June 1995, pp. 593–596.
[9] J. Wu, G.K. Fedder, L.R. Carley, “A low-noise low-offset capacitive
sensing amplifier for a 50- g/Hz monolithic CMOS MEMS
accelerometer”, IEEE J. of Solid-State Circuits, vol. 39, May 2004, pp.
722–730.
[10] C. T. Chiang, C. S. Wang and Y. C. Huang, "A CMOS integrated
capacitance-to-frequency converter with digital compensation circuit
designed for sensor interface applications," Proc. IEEE Sensors, pp. 954
–957, Oct. 2007.
[11] W. Bracke, P. Merken, R. Puers and C. V. Hoof, "Ultra-low-power
interface chip for autonomous capacitive sensor systems," IEEE Trans.
Circuits Syst. I, Reg. Papers, vol. 54, no. 1, pp. 130–140, Jan. 2007.
[12] Hans Danneels, Kristof Coddens and Georges Gielen, “A fully-digital,
0.3V, 270 nW capacitive sensor interface without external references,”
Proc. Of the ESSCIRC, pp. 287–290, Sep. 2011.
[13] Efstathios D. Kyriakis-Bitzaros, et. al., “A reconfigurable multichannel
capacitive sensor array interface,” IEEE Transactions on
Instrumentation and Measurement, vol. 60, pp. 3214–3221, Sep. 2011.
[14] Daheng Yin, Zunqiao Zhang, and Janwen Li “A simples
witchedcapacitor-based capacitance-to-frequency converter” Analog
Integrated Circuit and Signal Processing 1, pp.353–361, 1991.
[15] Krummenacher, “A high-resolution capacitance-tofrequency converter,”
IEEE Journal of Solid-State Circuits, vol. sc–20, no. 3, pp. 666–670,
Jun. 1985.
[16] Cheng-Ta Chiang, Chi-Shen Wang, and Yu-Chung Huang “ A CMOS
integrated capacitance-to-frequency converter with digital compensation
circuit designed for sensor interface applications”, in Proc. of IEEE
Sensors 2007, pp 954–957, 2007.
[17] Raúl Aragonés, et. al., “A capacitance-to-frequency converters
comparison for a frequency acquisition platform,” in Proc. of IEEE
Sensors 2007, pp 1431–1436, 2010.</p>
<p>[1] R. Puers, “Capacitive sensors: When and how to use them,” Sens.
Actuators A, Phys., vol. 37/38, pp. 93–105, Jun.–Aug. 1993.
[2] O. Brand, “Microsensor integration into systems-on-chip,” Proc. IEEE,
vol. 94, no. 6, pp. 1160–1176, Jun. 2006.
[3] Dong-Yong Shin, Hyunjoong Lee, and Suhwan Kim, “A delta–Sigma
interface circuit for capacitive sensors with an automatically calibrated
zero point,” IEEE Transactions on Circuits and Systems II: Express
Briefs, vol. 58, pp. 90–94 , Feb. 2011.
[4] Dong-Yong Shin, Hyunjoong Lee, and Suhwan Kim, “Improving the
accuracy of capacitance-to-frequency converter by accumulating
residual charges,” IEEE Transactions on Instrumentation and
Measurement, vol. 60, pp. 3950–3955, Dec. 2011.
[5] Zhichao Tan, et.al, “A 1.8V 11μW CMOS smart humidity sensor for
RFID sensing applications,” Proc. IEEE Asian Solid State Circuits
Conference, pp. 105–108, Nov. 2011.
[6] J. A. Geen, S. J. Sherman, J. F. Chang, S. R. Lewis, “Single chip surface
micromachined integrated gyroscope with 50°/h Allan deviation,” IEEE
J. of Solid-State Circuits, vol. 37, Dec. 2002, pp.1860–1866.
[7] S.J. Sherman, et.al., “Low cost monolithic accelerometer”, Dig. VLSI
Circuits Symp., June 1992, pp. 34–35.
[8] K. Chau, S.R. Lewis, Y, Zhao, R. T. Howe, S.F. Bart, and R.G.
Marcheselli, ”An integrated force-balanced capacitive accelerometer for
low-g applications,” 1995 IEEE Conf. on Solid-State Sensors &
Actuators, June 1995, pp. 593–596.
[9] J. Wu, G.K. Fedder, L.R. Carley, “A low-noise low-offset capacitive
sensing amplifier for a 50- g/Hz monolithic CMOS MEMS
accelerometer”, IEEE J. of Solid-State Circuits, vol. 39, May 2004, pp.
722–730.
[10] C. T. Chiang, C. S. Wang and Y. C. Huang, "A CMOS integrated
capacitance-to-frequency converter with digital compensation circuit
designed for sensor interface applications," Proc. IEEE Sensors, pp. 954
–957, Oct. 2007.
[11] W. Bracke, P. Merken, R. Puers and C. V. Hoof, "Ultra-low-power
interface chip for autonomous capacitive sensor systems," IEEE Trans.
Circuits Syst. I, Reg. Papers, vol. 54, no. 1, pp. 130–140, Jan. 2007.
[12] Hans Danneels, Kristof Coddens and Georges Gielen, “A fully-digital,
0.3V, 270 nW capacitive sensor interface without external references,”
Proc. Of the ESSCIRC, pp. 287–290, Sep. 2011.
[13] Efstathios D. Kyriakis-Bitzaros, et. al., “A reconfigurable multichannel
capacitive sensor array interface,” IEEE Transactions on
Instrumentation and Measurement, vol. 60, pp. 3214–3221, Sep. 2011.
[14] Daheng Yin, Zunqiao Zhang, and Janwen Li “A simples
witchedcapacitor-based capacitance-to-frequency converter” Analog
Integrated Circuit and Signal Processing 1, pp.353–361, 1991.
[15] Krummenacher, “A high-resolution capacitance-tofrequency converter,”
IEEE Journal of Solid-State Circuits, vol. sc–20, no. 3, pp. 666–670,
Jun. 1985.
[16] Cheng-Ta Chiang, Chi-Shen Wang, and Yu-Chung Huang “ A CMOS
integrated capacitance-to-frequency converter with digital compensation
circuit designed for sensor interface applications”, in Proc. of IEEE
Sensors 2007, pp 954–957, 2007.
[17] Raúl Aragonés, et. al., “A capacitance-to-frequency converters
comparison for a frequency acquisition platform,” in Proc. of IEEE
Sensors 2007, pp 1431–1436, 2010.</p>
@article{"International Journal of Electrical, Electronic and Communication Sciences:64691", author = "Yong Wang and Wang Ling Goh and Jung Hyup Lee and Kevin T. C. Chai and Minkyu Je", title = "Resonant-Based Capacitive Pressure Sensor Read-Out Oscillating at 1.67 GHz in 0.18 ", abstract = "This paper presents a resonant-based read-out circuit for capacitive pressure sensors. The proposed read-out circuit consists of an LC oscillator and a counter. The circuit detects the capacitance changes of a capacitive pressure sensor by means of frequency shifts from its nominal operation frequency. The proposed circuit is designed in 0.18 m CMOS with an estimated power consumption of 43.1mW. Simulation results show that the circuit has a capacitive resolution of 8.06kHz/fF, which enables it for high resolution pressure detection.
", keywords = "Capacitance-to-frequency converter, Capacitive
pressure sensor, Digital counter, LC oscillator.", volume = "7", number = "7", pages = "941-4", }
