Extraction of Graphene-Titanium Contact Resistances using Transfer Length Measurement and a Curve-Fit Method

Graphene-metal contact resistance limits the performance of graphene-based electrical devices. In this work, we have fabricated both graphene field-effect transistors (GFET) and transfer length measurement (TLM) test devices with titanium contacts. The purpose of this work is to compare the contact resistances that can be numerically extracted from the GFETs and measured from the TLM structures. We also provide a brief review of the work done in the field to solve the contact resistance problem.

• Johanna Anteroinen
• Wonjae Kim
• Kari Stadius
• Juha Riikonen
• Harri Lipsanen
• Jussi Ryynanen

• Contact resistance
• graphene
• TLM

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