Development of a Porous Silica Film by Sol-gel Process
In the present work homogeneous silica film on
silicon was fabricated by colloidal silica sol. The silica sol precursor
with uniformly granular particle was derived by the alkaline
hydrolysis of tetraethoxyorthosilicate (TEOS) in presence of glycerol
template. The film was prepared by dip coating process. The
templated hetero-structured silica film was annealed at elevated
temperatures to generate nano- and meso porosity in the film. The
film was subsequently annealed at different temperatures to make it
defect free and abrasion resistant. The sol and the film were
characterized by the measurement of particle size distribution,
scanning electron microscopy, XRD, FTIR spectroscopy,
transmission electron microscopy, atomic force microscopy,
measurement of the refractive index, thermal conductivity and
abrasion resistance. The porosity of the films decreased whereas
refractive index and dielectric constant of it `increased with the
increase in the annealing temperature. The thermal conductivity of
the films increased with the increase in the film thickness. The
developed porous silica film holds strong potential for use in
different areas.
[1] S. Sakka, Current sol gel activities in Japan, J. Sol Gel Sc.Tech., (2006),
37(2), 135-140.
[2] M. Novotny and J. Matousek, Preparation of silver doped silica sol-gel
layer, Ceramics-Silikaty, 52(2), 72-76(2008).
[3] M.A. Agerter, R. Almeida, A. Soutar, K. Tadanaga, H. Yang and T.
Watanabe, Coatings made by sol-gel and chemical nanotechnology, J.
Sol Gel Sci. Tech., (2008), 47(2), 203-236.
[4] H.J. Moon, H.P. Hyung, J.K. Domng, H.H. Sang, S.Y. Choi and J.T.
Paik, "SiO2 aerogel film as a novel intermetal dielectric", J. Appl.
Phys.(1997), 82(3), 1299-1305.
[5] C. Avelino, "From microporous to mesoporous molecular sieve materials
and their use in catalyst", Chem. Rev., (1997), 97, 2373-2381.
[6] S.A. Johnson, P.J. Ollivier and T.E. Mallock, "Ordered meso-porous
polymers of tunable pore size from colloidal silica templates", Science,
(1999), 283, 963-966.
[7] S. Nagarajan , M. Li , R. A. Pai , J. K. Bosworth , P. Busch , D.-M.
Smilgies , C. K. Ober, T. P. Russell and J. J. Watkins, "An Efficient
Route to Mesoporous Silica Films with Perpendicular Nanochannels"
Adv. Mater., (2007), 29(2), 246-251.
[8] J. K. Kim, J. K. Park and H. K. Kim, Preparation of a nano-porous silica
aerogel and its application to a bio-conversion process, Res.
Proces.(2006),53, 3-5.
[9] W. Li, S. Seal, E. Megan, J. Ramsdell and K. Scammon, Physical and
optical properties of sol-gel nanosilver doped silica film on glass
substrate as a function of heat treatment temperature, J. App. Phys.
(2003), 93(12), 9553-9561.
[10] M. Z. Yin, X. Yao and L. Y. Zhang, A novel fabrication of meso-porous
silica film by sol-gel of TEOS, J Zhejiang Univ. SCI., (2004), 5(4),
422-427.
[11] D.Y.Zheng, J.G.Feng, Q.S.Huo, N.Melosh, G.H.Fredrickson,
B.F.Chmelka, G.D.Stucky and T. Copolymer, Synthesis of meso-porous
silica with periodic 50 to 300 angstrompores, Science, (1998), 279, 548-
551.
[12] T.M.Parrill, Heat treatment of spun-on acid catalyzed sol-gel silica films,
J. Mater. Res., (1994), 9, 723-728.
[13] J. Wang, G. Wu, J.Shen, T.Yang, Q.Zhang, B. Zhou and Z.Deng,
Scratch resistant improvement of sol-gel derived nanoporous silica films,
J. Sol Gel Sci Tech., (200), 18, 219-224.
[14] Y. Tsuneyuki, N.Nagai, S.Katayama and M.Todoki, Measurement of
thermal conductivity of silicon dioxide thin film s using a 3ω method, J.
Appl. Phys., (2002), 91(12), 9772-9779.
[15] H.G.Floch and P.F.Belleville, A scratch resistant single layer AR coating
by a low temperature sol-gel route, Sol Gel Opt II-SPIE (1992), 1758,
135.
[16] C. J. Brinker and G. W. Scherrer, Sol Gel Science, The Physics and
Chemistry of Sol Gel Processing, Academic Press Inc., New York) 1990,
97.
[17] R K Iler, The Chemistry of Silica, (Wiley, New York) 1979, 348.
[18] F.L.Galeener, Planar rings in vitreous silica, J. Non Cryst Solid, (1982),
49(1-3), 53-62.
[19] P.F.Belleville and H.G. Floch, Ammonia hardening of porous silica
antireflective coatings, Sol Gel Opt. III-SPIE(1994), 2228, 25.
[1] S. Sakka, Current sol gel activities in Japan, J. Sol Gel Sc.Tech., (2006),
37(2), 135-140.
[2] M. Novotny and J. Matousek, Preparation of silver doped silica sol-gel
layer, Ceramics-Silikaty, 52(2), 72-76(2008).
[3] M.A. Agerter, R. Almeida, A. Soutar, K. Tadanaga, H. Yang and T.
Watanabe, Coatings made by sol-gel and chemical nanotechnology, J.
Sol Gel Sci. Tech., (2008), 47(2), 203-236.
[4] H.J. Moon, H.P. Hyung, J.K. Domng, H.H. Sang, S.Y. Choi and J.T.
Paik, "SiO2 aerogel film as a novel intermetal dielectric", J. Appl.
Phys.(1997), 82(3), 1299-1305.
[5] C. Avelino, "From microporous to mesoporous molecular sieve materials
and their use in catalyst", Chem. Rev., (1997), 97, 2373-2381.
[6] S.A. Johnson, P.J. Ollivier and T.E. Mallock, "Ordered meso-porous
polymers of tunable pore size from colloidal silica templates", Science,
(1999), 283, 963-966.
[7] S. Nagarajan , M. Li , R. A. Pai , J. K. Bosworth , P. Busch , D.-M.
Smilgies , C. K. Ober, T. P. Russell and J. J. Watkins, "An Efficient
Route to Mesoporous Silica Films with Perpendicular Nanochannels"
Adv. Mater., (2007), 29(2), 246-251.
[8] J. K. Kim, J. K. Park and H. K. Kim, Preparation of a nano-porous silica
aerogel and its application to a bio-conversion process, Res.
Proces.(2006),53, 3-5.
[9] W. Li, S. Seal, E. Megan, J. Ramsdell and K. Scammon, Physical and
optical properties of sol-gel nanosilver doped silica film on glass
substrate as a function of heat treatment temperature, J. App. Phys.
(2003), 93(12), 9553-9561.
[10] M. Z. Yin, X. Yao and L. Y. Zhang, A novel fabrication of meso-porous
silica film by sol-gel of TEOS, J Zhejiang Univ. SCI., (2004), 5(4),
422-427.
[11] D.Y.Zheng, J.G.Feng, Q.S.Huo, N.Melosh, G.H.Fredrickson,
B.F.Chmelka, G.D.Stucky and T. Copolymer, Synthesis of meso-porous
silica with periodic 50 to 300 angstrompores, Science, (1998), 279, 548-
551.
[12] T.M.Parrill, Heat treatment of spun-on acid catalyzed sol-gel silica films,
J. Mater. Res., (1994), 9, 723-728.
[13] J. Wang, G. Wu, J.Shen, T.Yang, Q.Zhang, B. Zhou and Z.Deng,
Scratch resistant improvement of sol-gel derived nanoporous silica films,
J. Sol Gel Sci Tech., (200), 18, 219-224.
[14] Y. Tsuneyuki, N.Nagai, S.Katayama and M.Todoki, Measurement of
thermal conductivity of silicon dioxide thin film s using a 3ω method, J.
Appl. Phys., (2002), 91(12), 9772-9779.
[15] H.G.Floch and P.F.Belleville, A scratch resistant single layer AR coating
by a low temperature sol-gel route, Sol Gel Opt II-SPIE (1992), 1758,
135.
[16] C. J. Brinker and G. W. Scherrer, Sol Gel Science, The Physics and
Chemistry of Sol Gel Processing, Academic Press Inc., New York) 1990,
97.
[17] R K Iler, The Chemistry of Silica, (Wiley, New York) 1979, 348.
[18] F.L.Galeener, Planar rings in vitreous silica, J. Non Cryst Solid, (1982),
49(1-3), 53-62.
[19] P.F.Belleville and H.G. Floch, Ammonia hardening of porous silica
antireflective coatings, Sol Gel Opt. III-SPIE(1994), 2228, 25.
@article{"International Journal of Chemical, Materials and Biomolecular Sciences:55761", author = "Binay K. Dutta and Tayseir M. Abd Ellateif and Saikat Maitra", title = "Development of a Porous Silica Film by Sol-gel Process", abstract = "In the present work homogeneous silica film on
silicon was fabricated by colloidal silica sol. The silica sol precursor
with uniformly granular particle was derived by the alkaline
hydrolysis of tetraethoxyorthosilicate (TEOS) in presence of glycerol
template. The film was prepared by dip coating process. The
templated hetero-structured silica film was annealed at elevated
temperatures to generate nano- and meso porosity in the film. The
film was subsequently annealed at different temperatures to make it
defect free and abrasion resistant. The sol and the film were
characterized by the measurement of particle size distribution,
scanning electron microscopy, XRD, FTIR spectroscopy,
transmission electron microscopy, atomic force microscopy,
measurement of the refractive index, thermal conductivity and
abrasion resistance. The porosity of the films decreased whereas
refractive index and dielectric constant of it `increased with the
increase in the annealing temperature. The thermal conductivity of
the films increased with the increase in the film thickness. The
developed porous silica film holds strong potential for use in
different areas.", keywords = "Silica film, Nanoporous, Sol-gel, Templating, Dip
coating.", volume = "5", number = "1", pages = "49-5", }