Abstract: This study is concerned with pH solution detection
using 2 × 4 flexible sensor array based on a plastic polyethylene
terephthalate (PET) substrate that is coated a conductive layer and a
ruthenium dioxide (RuO2) sensitive membrane with the technologies
of screen-printing and RF sputtering. For data analysis, we also
prepared a dynamic measurement system for acquiring the response
voltage and analyzing the characteristics of the working electrodes
(WEs), such as sensitivity and linearity. In this condition, an array
measurement system was designed to acquire the original signal from
sensor array, and it is based on the method of digital signal processing
(DSP). The DSP modifies the unstable acquisition data to a direct
current (DC) output using the technique of digital filter. Hence, this
sensor array can obtain a satisfactory yield, 62.5%, through the design
measurement and analysis system in our laboratory.
Abstract: Indium-tin oxide films are deposited by low plasma
temperature RF sputtering on highly flexible modification of glycol
polyethyleneterephtalate substrates. The produced layers are
characterized with transparency over 82 % and sheet resistance of
86.9 Ω/square. The film’s conductivity was further improved by
additional UV illumination from light source (365 nm), having power
of 250 W. The influence of the UV exposure dose on the structural
and electro-optical properties of ITO was investigated. It was
established that the optimum time of illumination is 10 minutes and
further UV treatment leads to polymer substrates degradation.
Structural and bonds type analysis show that at longer treatment
carbon atoms release and diffuse into ITO films, which worsen their
electrical behavior. For the optimum UV dose the minimum sheet
resistance was measured to be 19.2 Ω/square, and the maximum
transparency remained almost unchanged – above 82 %.