Abstract: In this paper, Fabless Prototyping Methodology is
introduced for the design and analysis of MEMS devices.
Conventionally Finite Element Analysis (FEA) is performed before
system level simulation. In our proposed methodology, system level
simulation is performed earlier than FEA as it is computationally less
extensive and low cost. System level simulations are based on
equivalent behavioral models of MEMS device. Electrostatic
actuation based MEMS Microgripper is chosen as case study to
implement this methodology. This paper addresses the behavioral
model development and simulation of actuator part of an
electrostatically actuated Microgripper. Simulation results show that
the actuator part of Microgripper works efficiently for a voltage range
of 0-45V with the corresponding jaw displacement of 0-4.5425μm.
With some minor changes in design, this range can be enhanced to
15μm at 85V.