Design and Analysis of an Electro Thermally Symmetrical Actuated Microgripper

This paper presents design and analysis of an electrothermally symmetrical actuated microgripper applicable for performing micro assembly or biological cell manipulation. Integration of micro-optics with microdevice leads to achieve extremely precise control over the operation of the device. Geometry, material, actuation, control, accuracy in measurement and temperature distribution are important factors which have to be taken into account for designing the efficient microgripper device. In this work, analyses of four different geometries are performed by means of COMSOL Multiphysics 5.2 with implementing Finite Element Methods. Then, temperature distribution along the fingertip, displacement of gripper site as well as optical efficiency vs. displacement and electrical potential are illustrated. Results show in addition to the industrial application of this device, the usage of that as a cell manipulator is possible.

Design of Compliant Mechanism Based Microgripper with Three Finger Using Topology Optimization

High precision in motion is required to manipulate the micro objects in precision industries for micro assembly, cell manipulation etc. Precision manipulation is achieved based on the appropriate mechanism design of micro devices such as microgrippers. Design of a compliant based mechanism is the better option to achieve a highly precised and controlled motion. This research article highlights the method of designing a compliant based three fingered microgripper suitable for holding asymmetric objects. Topological optimization technique, a systematic method is implemented in this research work to arrive a topologically optimized design of the mechanism needed to perform the required micro motion of the gripper. Optimization technique has a drawback of generating senseless regions such as node to node connectivity and staircase effect at the boundaries. Hence, it is required to have post processing of the design to make it manufacturable. To reduce the effect of post processing stage and to preserve the edges of the image, a cubic spline interpolation technique is introduced in the MATLAB program. Structural performance of the topologically developed mechanism design is tested using finite element method (FEM) software. Further the microgripper structure is examined to find its fatigue life and vibration characteristics.

Fabless Prototyping Methodology for the Development of SOI based MEMS Microgripper

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral models of MEMS device. Electrostatic actuation based MEMS Microgripper is chosen as case study to implement this methodology. This paper addresses the behavioral model development and simulation of actuator part of an electrostatically actuated Microgripper. Simulation results show that the actuator part of Microgripper works efficiently for a voltage range of 0-45V with the corresponding jaw displacement of 0-4.5425μm. With some minor changes in design, this range can be enhanced to 15μm at 85V.