Abstract: This paper details few mechanical modeling and
design issues of RF MEMS switches. We concentrate on an
electrostatically actuated broad side series switch; surface
micromachined with a crab leg membrane. The same results are
extended to any complex structure. With available experimental data
and fabrication results, we present the variation in dynamic
performance and compliance of the switch with reference to few
design issues, which we find are critical in deciding the dynamic
behavior of the switch, without compromise on the RF
characteristics. The optimization of pull in voltage, transient time and
resonant frequency with regard to these critical design parameters are
also presented.