Abstract: In the micro and nano-technology industry, the
«clean-rooms» dedicated to manufacturing chip, are equipped with
the most sophisticated equipment-tools. There use a large number of
resources in according to strict specifications for an optimum
working and result. The distribution of «utilities» to the production is
assured by teams who use a supervision tool.
The studies show the interest to control the various parameters of
production or/and distribution, in real time, through a reliable and
effective supervision tool. This document looks at a large part of the
functions that the supervisor must assure, with complementary
functionalities to help the diagnosis and simulation that prove very
useful in our case where the supervised installations are complexed
and in constant evolution.