Methodology of Realization for Supervisor and Simulator Dedicated to a Semiconductor Research and Production Factory

In the micro and nano-technology industry, the «clean-rooms» dedicated to manufacturing chip, are equipped with the most sophisticated equipment-tools. There use a large number of resources in according to strict specifications for an optimum working and result. The distribution of «utilities» to the production is assured by teams who use a supervision tool. The studies show the interest to control the various parameters of production or/and distribution, in real time, through a reliable and effective supervision tool. This document looks at a large part of the functions that the supervisor must assure, with complementary functionalities to help the diagnosis and simulation that prove very useful in our case where the supervised installations are complexed and in constant evolution.

Authors:

• Hanane Ondella
• Pierre Ladet
• David Ferrand
• Pat Sloan

Keywords:

• Control-Command
• evolution
• non regression
• performances
• real time
• simulation
• supervision.

References:

[1] Pujo P., Kieffer J-P., « Fondements du pilotage des systèmes de
production », Lavoisier, Paris, 2002, Ch3-5.
[2] David R., Alla H., « Petri nets and grafcet: tools for modelling discrete
event systems », Prentice Hall, Inc., New York, 1992, Ch1,2,4-6.
[3] El-Fattah Y.M., Foulard C., « Learning systems: decision, simulation
and control », Springer-Verlag, Berlin, 1978.
[4] Venkatesh K., Ilyas M., «Real-time petri nets for modeling, controlling,
and simulation of local area networks in flexible manufacturing
systems». Computers ind. Vol. 28, No. 1, pp. 147-162, Elsevier Science
Ltd, 1995.
[5] Charbonnier, F., Alla, H., & David, R. The supervised control of discrete
event dynamic systems. IEEE Transactions on Control Systems
Technology, 7(2), 175-187, 1999.
[6] Golaszewski, C. H., & Ramadge, P. J. (1987). Control of discrete-even
tprocesses with forced events. Proceedings of the 28th Conference on
Decision and Control (pp. 247-251). Los Angeles, 1987.