Abstract: Hard coatings are widely used in cutting and forming
tool industries. Titanium Nitride (TiN) possesses good hardness,
strength, and corrosion resistance. The coating properties are
influenced by many process parameters. The coatings were deposited
on steel substrate by changing the process parameters such as
substrate temperature, nitrogen flow rate and target power in a D.C
planer magnetron sputtering. The structure of coatings were analysed
using XRD. The hardness of coatings was found using Micro
hardness tester. From the experimental data, a regression model was
developed and the optimum response was determined using Response
Surface Methodology (RSM).