Response Surface Methodology for Optimum Hardness of TiN on Steel Substrate
Hard coatings are widely used in cutting and forming
tool industries. Titanium Nitride (TiN) possesses good hardness,
strength, and corrosion resistance. The coating properties are
influenced by many process parameters. The coatings were deposited
on steel substrate by changing the process parameters such as
substrate temperature, nitrogen flow rate and target power in a D.C
planer magnetron sputtering. The structure of coatings were analysed
using XRD. The hardness of coatings was found using Micro
hardness tester. From the experimental data, a regression model was
developed and the optimum response was determined using Response
Surface Methodology (RSM).
[1] T. An, M. Wen, L.L. Wang, C.Q. Hu, H.W. Tian and W.T. Zheng,
“Structures, mechanical properties and thermal stability of TiN/SiN x
multilayer coatings deposited by magnetron sputtering” Journal of
alloys and compounds, Vol. 486, pp 515-520, 2009.
[2] A. Wisby, P.J Gregson and M. Tuke, “Application of PVD TiN coating
to Co-Cr-Mo based surgical implants,” Biomaterials,, Vol.8, pp 477-
480, 1987B.
[3] Y. Mitamuo, T. Mikami and T. Yuton, “Development of fine ceramic
heart valve for use as a cardiac prosthesis,” Transactions of American
society. Artif Intern Organs, Vol.32, pp 444-448, 1986.
[4] O. Knotek, F. Loffler and K. Weitkamp, “Physical vapour deposition
coatings for dental prostheses,” Surface and Coatings Technology,
Vol.54/55, pp 536-540, 1992.
[5] T. Cselle and A. Barimani, “Today's applications and future
developments of coatings for drills and rotating cutting tools” Surface
and Coatings Technology, Vol.76/77, pp 712-718, 1995.
[6] J. Vettor, “Vacuum arc coatings for tools: potential and application”
Surface and Coatings Technology, Vol.76/77, pp 719-724, 1995.
[7] T. Suni, D. Sigurd, K.T. Hu and M.A Nicolet, “Thermal Oxidation of
Reactively Sputtered Titanium Nitride and Hafnium Nitride Films”
Journal of Electrochemical society’, Vol.130, pp1210-1214, 1983.
[8] D. Maheo and J. M. Poitevin, “Structure of TiN films deposited on
heated and negatively biased silicon substrates” Thin Solid Films,
Vol.215 No.1, pp 8-13, 1992.
[9] Guenther Hrkoltz and Hans Eligehausen, “Technological Advances in
Physical Vapor Depostion,”IEE Transctions on Components, hybrids
and manufacturing technology, vol.chmt-6 No2, 1983.
[10] W. D. Sproul, P. J. Rudnik, M. E. Graham, “The effect of N2 partial
pressure, deposition rate and substrate bias potential on the hardness and
texture of reactively sputtered TiN coatings” Surface and Coatings
Technology, Vol.39-40,Part-I, December 1989, Pages 355–363pp.
[11] Chi-Tung Huang and Jenq-Gong Duh, “Depostion of (Ti, AlN) films on
A2 steel by reactive r.f magnetron sputtering,” Surface and Coatings
Technology, Vol.71/95, pp 259- 266
[12] Nadia Saoula, Karim Hendai and Rafika Kesri, “Influence of Nitrogen
Content on the Structural and Mechanical Properties of TiN Thin
Films,” J. Plasma Fusion Res. SERIES, Vol. 8 (2009).
[13] Raymond. H Myers, D.C. Montgomery, “Response surface
Methodology,” Third ed., John Wiley & Sons.
[1] T. An, M. Wen, L.L. Wang, C.Q. Hu, H.W. Tian and W.T. Zheng,
“Structures, mechanical properties and thermal stability of TiN/SiN x
multilayer coatings deposited by magnetron sputtering” Journal of
alloys and compounds, Vol. 486, pp 515-520, 2009.
[2] A. Wisby, P.J Gregson and M. Tuke, “Application of PVD TiN coating
to Co-Cr-Mo based surgical implants,” Biomaterials,, Vol.8, pp 477-
480, 1987B.
[3] Y. Mitamuo, T. Mikami and T. Yuton, “Development of fine ceramic
heart valve for use as a cardiac prosthesis,” Transactions of American
society. Artif Intern Organs, Vol.32, pp 444-448, 1986.
[4] O. Knotek, F. Loffler and K. Weitkamp, “Physical vapour deposition
coatings for dental prostheses,” Surface and Coatings Technology,
Vol.54/55, pp 536-540, 1992.
[5] T. Cselle and A. Barimani, “Today's applications and future
developments of coatings for drills and rotating cutting tools” Surface
and Coatings Technology, Vol.76/77, pp 712-718, 1995.
[6] J. Vettor, “Vacuum arc coatings for tools: potential and application”
Surface and Coatings Technology, Vol.76/77, pp 719-724, 1995.
[7] T. Suni, D. Sigurd, K.T. Hu and M.A Nicolet, “Thermal Oxidation of
Reactively Sputtered Titanium Nitride and Hafnium Nitride Films”
Journal of Electrochemical society’, Vol.130, pp1210-1214, 1983.
[8] D. Maheo and J. M. Poitevin, “Structure of TiN films deposited on
heated and negatively biased silicon substrates” Thin Solid Films,
Vol.215 No.1, pp 8-13, 1992.
[9] Guenther Hrkoltz and Hans Eligehausen, “Technological Advances in
Physical Vapor Depostion,”IEE Transctions on Components, hybrids
and manufacturing technology, vol.chmt-6 No2, 1983.
[10] W. D. Sproul, P. J. Rudnik, M. E. Graham, “The effect of N2 partial
pressure, deposition rate and substrate bias potential on the hardness and
texture of reactively sputtered TiN coatings” Surface and Coatings
Technology, Vol.39-40,Part-I, December 1989, Pages 355–363pp.
[11] Chi-Tung Huang and Jenq-Gong Duh, “Depostion of (Ti, AlN) films on
A2 steel by reactive r.f magnetron sputtering,” Surface and Coatings
Technology, Vol.71/95, pp 259- 266
[12] Nadia Saoula, Karim Hendai and Rafika Kesri, “Influence of Nitrogen
Content on the Structural and Mechanical Properties of TiN Thin
Films,” J. Plasma Fusion Res. SERIES, Vol. 8 (2009).
[13] Raymond. H Myers, D.C. Montgomery, “Response surface
Methodology,” Third ed., John Wiley & Sons.
@article{"International Journal of Chemical, Materials and Biomolecular Sciences:71706", author = "R. Joseph Raviselvan and K. Ramanathan and P. Perumal and M. R. Thansekhar", title = "Response Surface Methodology for Optimum Hardness of TiN on Steel Substrate", abstract = "Hard coatings are widely used in cutting and forming
tool industries. Titanium Nitride (TiN) possesses good hardness,
strength, and corrosion resistance. The coating properties are
influenced by many process parameters. The coatings were deposited
on steel substrate by changing the process parameters such as
substrate temperature, nitrogen flow rate and target power in a D.C
planer magnetron sputtering. The structure of coatings were analysed
using XRD. The hardness of coatings was found using Micro
hardness tester. From the experimental data, a regression model was
developed and the optimum response was determined using Response
Surface Methodology (RSM).", keywords = "Hardness, RSM, sputtering, TiN XRD.", volume = "9", number = "12", pages = "1448-7", }
